Initiated CVD of poly(methyl methacrylate) thin films

Chemical Vapor Deposition

Volumn 11, Issue 10, 2005, Pages 437-443

  Chan, Kelvin ^a   Gleason, Karen K ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b NONE

Author keywords

Free radical polymerization; Hot filament CVD; Poly(methyl methacrylate)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; FREE RADICAL POLYMERIZATION; MIXTURES; MONOMERS; POLYMETHYL METHACRYLATES; X RAY PHOTOELECTRON SPECTROSCOPY;

GASEOUS MIXTURE; HOT-FILAMENT CVD; TRIETHYLAMINE;

THIN FILMS;

EID: 27744501937     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200506381     Document Type: Article

References (45)

1. H. Yasuda, Plasma Polymerization, Academic, Orlando, FL 1985.
2. J. R. Hollahan, A. T. Bell, Techniques and Applications of Plasma Chemistry, Wiley, New York 1974.
3. P. W. Kramer, Y. S. Yeh, H. Yasuda, J. Membr. Sci. 1989, 46, 1.
4. S. P. Russell, D. H. Weinkauf, Polymer 2001, 42, 2827.
5. A. R. K. Ralston, J. A. Tobin, S. S. Bajikar, D. D. Denton, Sens. Actuators, B 1994, 22, 139.
6. G. F. Li, J. A. Tobin, D. D. Denton, Appl. Phys. Lett. 1993, 62, 1582.
7. R. Capan, A. K. Ray, A. K. Hassan, T. Tanrisever, J. Phys. D: Appl. Phys. 2003, 36, 1115.
8. C. Zhang, J. Wyatt, D. H. Weinkauf, Polymer 2004, 45, 7665.
9. W. H. Teh, C. T. Liang, M. Graham, C. G. Smith, J. Microelectromech. Syst. 2003, 12, 641.
10. J. Tamano, S. Hattori, S. Morita, K. Yoneda, Plasma Chem. Plasma Proc. 1981, 1, 261.
11. S. Morita, J. Tamano, S. Hattori, M. Ieda, J. Appl. Phys. 1980, 51, 3938.
12. M. Yamada, J. Tamano, K. Yoneda, S. Morita, S. Hattori, Jpn. J. Appl. Phys. 1982, 21, 768.
13. L. Martinu, H. Biederman, Vacuum 1983, 33, 253.
14. J. A. Tobin, D. D. Denton, Appl. Phys. Lett. 1992, 60, 2595.
15. Y. Zhao, F. Wang, Z. C. Cui, J. Zheng, H. M. Zhang, D. M. Zhang, S. Y. Liu, M. B. Yi, Microelectron. J. 2004, 35, 605.
16. H. O. Pierson, Handbook of Chemical Vapor Deposition, 2nd ed., Noyes Publications, Norwich, NY 1999.
17. Y. Mao, K. K. Gleason, Langmuir 2004, 20, 2484.
18. K. K. S. Lau, K. K. Gleason, J. Fluor. Chem. 2000, 104, 119.
19. L. S. Loo, K. K. Gleason, Electrochem. Solid State Lett. 2001, 4, G81.
20. H. G. Pryce Lewis, T. B. Casserly, K. K. Gleason, J. Electrochem. Soc. 2001, 148, F212.
21. H. G. Pryce Lewis, J. A. Caulfield, K. K. Gleason, Langmuir 2001, 17, 7652.
22. S. K. Murthy, B. D. Olsen, K. K. Gleason, Langmuir 2002, 18, 6424.
23. S. J. Limb, C. B. Labelle, K. K. Gleason, D. J. Edell, E. F. Gleason, Appl. Phys. Lett. 1996, 68, 2810.
24. N. Inagaki, Plasma Surface Modification and Plasma Polymerization, Technomic, Lancaster, PA 1996.
25. N. Morosoff, in Plasma Deposition, Treatment, and Etching of Polymers (Ed: R. d'Agostino), Academic Press, Boston, MA 1990.
26. D. D. Burkey, K. K. Gleason, Chem. Vap. Deposition 2003, 9, 65.
27. S. J. Limb, K. K. S. Lau, D. J. Edell, E. F. Gleason, K. K. Gleason, Plasmas Polym. 1999, 4, 21.
28. S. Beuermann, M. Buback, T. P. Davis, N. Garcia, R. G. Gilbert, R. A. Hutchinson, A. Kajiwara, M. Kamachi, I. Lacik, G. T. Russell, Macromol. Chem. Phys. 2003, 204, 1338.
29. H. A. Taylor, E. E. Juterbock, J. Phys. Chem. 1935, 39, 1103.
30. L. E. Manring, Macromolecules 1991, 24, 3304.
31. B. J. Holland, J. N. Hay, Polymer 2001, 42, 4825.
32. G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers: the Scienta ESCA300 Database, Wiley, Chichester, UK 1992.
33. H. Nagai, J. Appl. Polym. Sci. 1963, 7, 1697.
34. D. Lin-Vien, N. B. Colthup, W. G. Fateley, J. G. Grasselli, The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules, Academic Press, San Diego, CA 1991.
35. E. Pretsch, P. Bühlmann, C. Affolter, Structure Determination of Organic Compounds: Tables of Spectral Data, 3rd Ed., Springer-Verlag, Berlin 2000.
36. J. N. Cox, in Encyclopedia of Materials Characterization: Surfaces, Interfaces. Thin Films (Eds: C. R. Brundle, C. A. Evans, S. Wilson), Butterworth-Heinemann, Stoneham, MA 1992.
37. Y. V. Pan, E. Z. Barrios, D. D. Denton, J. Polym. Sci., Part A: Polym. Chem. 1998, 36, 587.
38. Y. V. Pan, E. Z. Barrios, D. D. Denton, Appl. Phys. Lett. 1996, 68, 3386.
39. H. S. Jeon, J. Wyatt, D. Harper-Nixon, D. H. Weinkauf, J. Polym. Sci., Part B: Polym. Phys. 2004, 42, 2522.
40. Q. T. Pham, R. Pétiaud, Proton and Carbon NMR Spectra of Polymers, 5th Ed., Wiley, Chichester, UK 2003.
41. K. Hatada, T. Kitayama, N MR Spectroscopy of Polymers, Springer-Verlag, Berlin 2004.
42. E. F. McCord, W. L. Anton, L. Wilczek, S. D. Ittel, L. T. J. Nelson, K. D. Raffell, J. E. Hansen, C. Berge, Macromol. Symp. 1994, 86, 47.
43. K. C. Ramey, J. Polym. Sci., Polym. Lett. 1967, 5, 859.
44. F. A. Bovey, High Resolution NMR of Macromolecules, Academic Press, New York 1972.
45. M. D. Bala, J. L. Huang, H. Zhang, Y. L. Qian, J. Q. Sun, C. F. Liang, J. Organomet. Chem. 2002, 647, 105.