Microfabrication of 3D neural probes with combined electrical and chemical interfaces

Journal of Micromechanics and Microengineering

Volumn 21, Issue 10, 2011, Pages

  John, Jessin ^a,b   Li, Yuefa ^a   Zhang, Jinsheng ^c   Loeb, Jeffrey A ^b   Xu, Yong ^a  

^a Wayne State University   (United States)

^b WAYNE STATE UNIVERSITY SCHOOL OF MEDICINE   (United States)

^c WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D ARRAYS; ANIMAL TESTS; CHEMICAL INTERFACES; ELECTRODE SURFACES; FLOW CHARACTERISTIC; GAS PHASE ETCHING; HIGHER YIELD; IMPEDANCE ANALYSIS; LOWER COST; NEURAL PROBES; OPTICAL IMAGING; PACKAGING PROCESS; PARYLENES; SILICON ISLANDS;

ATOMIC FORCE MICROSCOPY; ELECTRODES; MICROCHANNELS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

PROBES;

EID: 80053592915     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/10/105011     Document Type: Article

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