Plasma-etched neural probes

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 27-35

  Kewley, David T ^a   Hills, Matthew D ^b   Borkholder, David A ^b   Opris, Ion E ^b,c   Maluf, Nadim I ^b,d,e   Storment, Christopher W ^b,f   Bower, James M ^a   Kovacs, Gregory T A ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Stanford University   (United States)

^c NATIONAL SEMICONDUCTOR CORPORATION   (United States)

^d Siliconix Inc   (United States)

^e Lucas NovaSensor   (United States)

^f STANFORD UNIVERSITY   (United States)

Author keywords

Neural probes; Neurobiology; Plasma etching

Indexed keywords

AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; MICROMACHINING; NEUROLOGY; PLASMA ETCHING; SEMICONDUCTING SILICON;

NEURAL PROBES; NEUROBIOLOGY;

PROBES;

EID: 0030674829     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80221-X     Document Type: Article

References (19)

1. U.S. Bhalla and J.M. Bower, Multi-day recordings from olfactory bulb neurons in awake freely moving rats: spatial and temporal patterns in odorant responses, J. Computational Neurosci. in press.
2. M.A. Wilson and B.L. McNaughton, Reactivation of hippocampal ensemble memories during sleep, Science, 265 (1994) 676.
3. M.A.L. Nicolelis, L.A. Baccala, R.C.S. Lin and J.K. Chapin, Sensorimotor encoding by synchronous neural ensemble activity at multiple levels of the somatosensory system, Science, 268 (1995) 1353.
4. K. Sasaki, J.M. Bower and R. Llinas, Multiple Purkinje cell recording in rodent cerebellar cortex, Eur. J. Neurosci., 1 (1989) 572.
5. C.M. Gray, P.E. Maldonado, M. Wilson and B. McNaughton, Tetrodes markedly improve the reliability and yield of multiple single-unit isolation from multiunit recordings in cat striate cortex, J. Neurosci. Methods, 63 (1995) 43.
6. K.D. Wise, J.B. Angell and A. Starr, An integrated-circuit approach to extracellular microelectrodes, IEEE Trans. Biomed. Eng., BME-17 (1970) 238.
7. K. Najafi, K.D. Wise and T. Mochizuki, A high-yield IC-compatible multichannel recording array, IEEE Trans, Electron Devices, ED-32 (1985) 1206.
8. K. Takahashi and M. Tadayuki, Integration of multi-microelectrode and interface circuits by silicon planar and three-dimensional fabrication technology, Sensors and Actuators, 5 (1984) 89.
9. L.D. Clark, System for chronic neural signal transduction processing and control, Ph.D. Dissertation, Massachusetts Institute of Technology (1990).
10. N.A. Blum, B.G. Carkhuff, H.K. Charles, Jr., R.L. Edwards and R.A. Meyer, Multisite microprobes for neural recordings, IEEE Trans. Biomed. Eng., 38 (1991) 68.
11. M. Kuperstein and H. Eichenbaum, Unit activity, evoked potentials and slow waves in the rat hippocampus and olfactory bulb recorded with a 24-channel microelectrode, Neuroscience, 15 (1985) 703.
12. E. Peeters, B. Puers, W. Sansen, J. Gybels and P. DeSutter, A two-wire, digital output multichannel microprobe for recording single-unit neural activity, Sensors and Actuators B, 4 (1991) 217.
13. R.S. Pickard, P. Wall and M. Ubeid, Recording neural activity in the honeybee brain with micromachined silicon sensors, Sensors and Actuators, B1 (1990) 460.
14. O.J. Prohaska, F. Pacha, P. Pfundner and H. Petsche, A 16-fold semi-microelectrode for intracortical recording of field potentials, Electroenceph. Clin. Neurophysiol., 47 (1979) 629.
15. R.S. Pickard, A review of printed circuit microelectrodes and their production, J. Neurosci. Methods, 1 (1979) 301.
16. G.T.A. Kovacs, Microelectrode models for neural interfaces, in D.A. Stenger and T.M. McKenna (eds.), Enabling Technologies for Cultured Neural Networks, Academic Press, SanDiego, 1994, pp. 121-165.
17. G.T.A. Kovacs, C.W. Storment, M. Halks-Miller, CR. Belczynski, Jr., C. DellaSantina, E.R. Lewis and N.I. Maluf, Silicon-substrate microelectrode arrays for parallel recording of neural activity in peripheral and cranial nerves, IEEE Trans. Biomed. Eng., 41 (1994) 567.
18. Personal correspondence with EIC Laboratories, March 1995.
19. E. Klaassen, K. Petersen, J. Noworolski, J. Logan, N.I. Maluf, J. Brown, C. Storment, W. McCulley and G.T.A. Kovacs, Silicon fusion bonding and deep reactive ion etching; a new technology for microstructures, Proc. 8th Int. Conf. Solid-State sensors and Actuators (Eurosensors IX/Transducers '95), Stockholm, Sweden, 25-29 June, 1995, pp. 556-559.