Silicon-based microelectrodes for neurophysiology, micromachined from silicon-on-insulator wafers

Medical and Biological Engineering and Computing

Volumn 38, Issue 2, 2000, Pages 175-179

  Ensell, G ^a   Banks, D J ^b   Richards, P R ^b   Balachandran, W ^c   Ewins, D J ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b UNIVERSITY OF SURREY   (United Kingdom)

^c BRUNEL UNIVERSITY   (United Kingdom)

Author keywords

Microelectrodes; Neurophysiology; Neurotechnology; Silicon micromachining

Indexed keywords

MICROMACHINING; NEUROPHYSIOLOGY; SEMICONDUCTING BORON; SEMICONDUCTOR DOPING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

BONDED AND ETCHED-BACK SILICON-ON-INSULATOR (BESOI) WAFERS; NEUROTECHNOLOGY;

MICROELECTRODES;

BORON; GOLD; SILICON;

ARTICLE; BIOENGINEERING; MICROELECTRODE; NEUROPHYSIOLOGY; NONHUMAN;

EID: 0034105070     PISSN: 01400118     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02344773     Document Type: Article

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