Implantable multichannel electrode array based on SOI technology

Journal of Microelectromechanical Systems

Volumn 12, Issue 2, 2003, Pages 179-184

  Cheung, Karen C ^a   Djupsund, Kaj ^b   Dan, Yang ^b   Lee, Luke P ^a  

^a University of California at Berkeley   (United States)

^b University of California Berkeley   (United States)

Author keywords

Implantable multielectrode array; Neural probe; Silicon on insulator (SOI)

Indexed keywords

DATA RECORDING; DOPING (ADDITIVES); ELECTRODES; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

IMPLANTABLE MULTIELECTRODE ARRAYS;

ARRAYS;

EID: 0344088284     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809962     Document Type: Article

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