Femtosecond laser damage and ablation of dielectrics: Determinism, selectivity and nanometric resolution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7842, Issue , 2010, Pages

  Sanner, N ^a   Uteza O ^a   Chimier, B ^a   Brocas, A ^a   Varkentina, N ^a   Sentis, M ^a   Lassonde, P ^b   Legare F ^b   Kieffer, J C ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b INRS EMT   (Canada)

Author keywords

ablation; determinism; Laser induced damage; ultrashort pulses

Indexed keywords

ABLATION; FEMTOSECOND LASERS; FUSED SILICA; ULTRASHORT PULSES;

DETERMINISM; FEMTOSECOND REGIMES; HIGH SELECTIVITY; IONIZATION MECHANISMS; NANOMETRIC RESOLUTION; PHYSICAL CHARACTERISTICS; QUANTITATIVE KNOWLEDGE; SURFACE ABLATION;

LASER DAMAGE;

EID: 79751493884     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.866738     Document Type: Conference Paper

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