Femtosecond laser micromachining of fused silica molds

Optics Express

Volumn 18, Issue 21, 2010, Pages 21826-21840

  Madani Grasset, Frédéric ^a   Bellouard, Yves ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; GLASS LASERS; MOLDING; MOLDS; PULSED LASER APPLICATIONS; SILICA; SURFACE PROPERTIES; THREE DIMENSIONAL; ULTRASHORT PULSES;

CHEMICAL ETCHING; EFFICIENT METHOD; FEMTO-SECOND LASER; FEMTOSECOND LASER BEAMS; FEMTOSECOND LASER MICROMACHINING; FEMTOSECOND LASER PROCESSING; HIGH ASPECT RATIO; HIGH FIDELITY; LOW ENERGIES; MULTISCALES; NANO-METER SCALE; NEW OPPORTUNITIES; PATTERNED SURFACE; PRODUCTION RATES; SERIAL PROCESS; SPATIAL CHARACTERIZATION; THREE-DIMENSIONAL STRUCTURE;

FUSED SILICA;

EID: 78049526067     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.021826     Document Type: Article

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