Characterization of thin films of a-SiOx (1.1 < x < 2.0) prepared by reactive evaporation of SiO

Journal of Physics Condensed Matter

Volumn 15, Issue 47, 2003, Pages 8123-8135

  Durrani, S M A ^a   Al Kuhaili, M F ^a   Khawaja, E E ^a  

^a KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS   (Saudi Arabia)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; EVAPORATION; FUSED SILICA; OXYGEN; REFRACTIVE INDEX; SPECTROPHOTOMETRY; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYGEN CONCENTRATION; OXYGEN PRESSURE; RANDOM-BONDING MODEL; REACTIVE EVAPORATION;

THIN FILMS;

EID: 0347588176     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/15/47/015     Document Type: Article

References (23)

1. Shibayama H, Hasuo S and Yamaoka T 1985 Appl. Phys. Lett. 47 429
2. Drinek V, Pola J, Bastl Z and Subrt J 2001 J. Non-Cryst. Solids 288 30
3. O'Leary M J and Thomas J H III 1987 J. Vac. Sci. Technol. A 5 106
4. Spiga S, Tallarida G, Borghesi A, Sassella A and De Santi G 1998 Thin Solid Films 325 36
5. Hass G 1950 J. Am. Ceram. Soc. 33 353
6. Hass G and Salzberg C D 1954 J. Opt. Soc. Am. 44 181
7. Hass G 1955 J. Opt. Soc. Am. 45 945
8. Philipp H R 1972 J. Non-Cryst. Solids 8-10 627
9. Grunthaner F J, Grunthanar P J, Vasquez R P, Lewis B F, Maserjian J and Madhukar A 1979 J. Vac. Sci. Technol. 16 1443
10. Hübner K 1980 Phys. Status Solidi a 61 665
11. Finster J, Schulze D and Meisel A 1985 Surf. Sci. 162 671
12. Bell F G and Ley L 1988 Phys. Rev. B 37 8383
13. Nguyen T P and Lefrant S 1989 J. Phys.: Condens. Matter 1 5197
14. Alfonsetti R, Lozzi L, Passacantando M, Picozzi P and Santucci S 1993 Appl. Surf. Sci. 70/71 222
15. Barranco A, Mejias J A, Espinos J P, Caballero A, Gonzalez-Elipe A R and Yubero F 2001 J. Vac. Sci. Technol. A 19 136
16. Barranco A, Yubero F, Espinos J P, Holgado J P, Caballero A, Gonzalez-Elipe A R and Mejias J A 2002 Vacuum 67 491
17. Khawaja E E and Bouamrane F 1993 Appl. Opt. 32 1168.
18. Khawaja E E, Hussain Z, Jazzar M S and Dabbousi O B 1987 J. Non-Cryst. Solids 93 45
19. Mullenberg G E 1979 Handbook of X-Ray Photoelectron Spectroscopy (Eden Prairie, MN: Perkin-Elmer) p 18
20. Heavens O S 1991 Optical Properties of Thin Solid Films (London: Butterworth) p 77
21. Khawaja E E, Bouamrane F, Al-Adel F F, Hallak A B, Daous M A and Salim M A 1994 Thin Solid Films 240 121
22. Khawaja E E, Durrani S M A and Daous M A 1997 J. Phys.: Condens. Matter 9 9381
23. Pulker H K 1984 Coatings on Glass (Amsterdam: Elsevier) p 356