Swift heavy ion induced structural modifications in indium oxide films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 20, 2010, Pages 3335-3339

  Tripathi, Neeti ^a   Rath, Shyama ^a   Kulriya, P K ^b   Khan, S A ^b   Kabiraj, D ^b   Avasthi, D K ^b  

^a UNIVERSITY OF DELHI   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

Electrical properties; ERDA; Indium oxide films; Swift heavy ions; X ray diffraction

Indexed keywords

ANNEALED FILMS; CLUSTER SIZES; ELASTIC RECOIL DETECTION ANALYSIS; ELECTRICAL MODIFICATION; ELECTRICAL PROPERTY; ELECTRON BEAM EVAPORATION; ERDA; FLUENCES; INDIUM OXIDE; INDIUM OXIDE FILMS; ION FLUENCES; OXYGEN LOSS; STOICHIOMETRIC FILMS; STRUCTURAL MODIFICATIONS; SWIFT HEAVY IONS; THERMAL-ANNEALING;

ANNEALING; DIFFRACTION; ELECTRIC PROPERTIES; HEAVY IONS; INDIUM; IRRADIATION; OXYGEN; PHASE SEPARATION; SILVER; STOICHIOMETRY; X RAY DIFFRACTION;

OXIDE FILMS;

EID: 77956394610     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.07.009     Document Type: Article

References (24)

1. M. Toulemonde, S. Bouffard, and F. Studer Nucl. Instrum. Methods B 91 1994 108
2. W. Wesch, A. Kamarou, and E. Wendler Nucl. Instrum. Methods B 225 2004 111
3. T. Mohanty, P.V. Satyam, and D. Kanjilal J. Nanosci. Nanotechnol. 6 2006 1
4. Mukesh Kumar, P.G. Ganesan, V.N. Singh, B.R. Mehta, and J.P. Singh Nanotechnology 19 2008 175606
5. Madhavi Thakurdesai, A. Mahadkar, P.K. Kulriya, D. Kanjilal, and Varsha Bhattacharyya Nucl. Instrum. Methods B 266 2008 1343
6. D.C. Agarwal, R.S. Chauhan, D.K. Avasthi, S.A. Khan, D. Kabiraj, and I. Sulania J. Appl. Phys. 104 2008 024304
7. A. Benyagoub, F. Levesque, F. Couvreur, C. Gibert-Mougel, C. Dufour, and E. Paumier Appl. Phys. Lett. 77 2000 133109
8. H. Rath, P. Dash, T. Som, P.V. Satyam, U.P. Singh, P.K. Kulriya, D. Kanjilal, D.K. Avasthi, and N.C. Mishra J. Appl. Phys. 105 2009 074311
9. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, and F. Priolo Nature 408 2000 440
10. J.J. Van Hapert, A.M. Vredenberg, E.E. Van Faassen, N. Tomozeiu, W.M. Arnoldbik, and F.H.P.M. Habraken Phys. Rev. B 69 2004 245202
11. W.M. Arnoldbik, N. Tomozeiu, E.D. van Hattum, R.W. Lof, A.M. Vredenberg, and F.H.P.M. Habraken Phys. Rev. B 71 2005 125329
12. A. Sarikov, V. Litovchenko, I. Lisovskyy, I. Maidanchuk, and S. Zlobin Appl. Phys. Lett. 91 2007 133109
13. P.S. Choudhari, Tejashree M. Bhave, Renu Pasricha, Fouran Singh, D. Kanjilal, and S.V. Bhoraskar Nucl. Instrum. Methods B 239 2005 185
14. D. Rodichev, Ph. Lavallard, E. Dooryhee, A. Slaoui, J. Perriere, M. Gandais, and Y. Wang Nucl. Instrum. Methods B 107 1996 259
15. A.D. Touboul, J.F. Carlotti, M. Marinoni, M. Cussanel, M. Ramonda, C. Guasch, G. Bruguier, J. Bonnet, F. Saigne, and J. Gasiot J. Noncrsyt. Solids 351 2005 3834
16. Y. Batra, D. Kabiraj, S. Kumar, and D. Kanjilal J. Phys. D: Appl. Phys. 40 2007 4568
17. S. Rath, Manoj Kumar, A.K. Shukla, H.S. Mavi, D. Kabiraj, and D.K. Avasthi Nucl. Instrum. Methods B 263 2007 419
18. JCPDF# 851409.
19. JCPDF # 760152.
20. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamon New York
21. M. Toulemonde, C. Dufour, and E. Paumier Phys. Rev. B 46 1992 14362
22. P. Boha, L. Jastrabik, D. Chvostova, and V. Zelezy Vacuum 41 1990 1466
23. T.P. Bartel, C. Kisielowski, P. Specht, T.V. Shubina, V.N. Jmerik, and S.V. Ivanov Appl. Phys. Lett. 91 2007 101908
24. Ting-Ting Kang, Akihiro Hashimoto, and Akio Yamamoto Appl. Phys. Lett. 92 2008 111902