SCOPUS 정보 검색 플랫폼

Volumn 99, Issue 11, 2011, Pages

Elastic relaxation in an ultrathin strained silicon-on-insulator structure

(8) Xiong, Gang a Moutanabbir, Oussama b Huang, Xiaojing a,c Paknejad, Seyed A a Shi, Xiaowen a Harder, Ross c Reiche, Manfred b Robinson, Ian K a,d

a UNIVERSITY COLLEGE LONDON (United Kingdom)

b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS (Germany)

c ARGONNE NATIONAL LABORATORY (United States)

d Research Complex (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BIAXIAL TENSILE STRAIN; COHERENT X-RAY DIFFRACTION; DECAY LENGTH; ELASTIC RELAXATION; FREE SURFACES; NANO SCALE; OVER-ETCHING; RELAXATION BEHAVIORS; STRAINED SILICON; STRAINED SILICON-ON-INSULATOR; THREE DIMENSIONAL SIMULATIONS; TWO-DIMENSIONAL MAP; ULTRA-THIN;

CRYSTALLOGRAPHY; THREE DIMENSIONAL COMPUTER GRAPHICS; X RAY DIFFRACTION;

TENSILE STRAIN;

EID: 80053200687 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3637634 Document Type: Article

Times cited : (17)

References (18)

1
- 67650979407
- 10.1146/annurev-matsci-082908-145312
- M. Chu, Y. Sun, U. Aghoram, and S. E. Thompson, Annu. Rev. Mater. Res. 39, 203 (2009). 10.1146/annurev-matsci-082908-145312
- (2009) Annu. Rev. Mater. Res. , vol.39 , pp. 203
- Chu, M.¹ Sun, Y.² Aghoram, U.³ Thompson, S.E.⁴

2
- 19944433396
- 10.1063/1.1819976
- M. L. Lee, E. A. Fitzgerald, M. T. Bulsara, and A. Lochtefeld, J. Appl. Phys. 97, 011101 (2005). 10.1063/1.1819976
- (2005) J. Appl. Phys. , vol.97 , pp. 011101
- Lee, M.L.¹ Fitzgerald, E.A.² Bulsara, M.T.³ Lochtefeld, A.⁴

3
- 77954216281
- 10.1016/j.sse.2010.04.032
- S. Baudot, F. Andrieu, O. Faynot, and J. Eymery, Solid-State Electron. 54, 861 (2010). 10.1016/j.sse.2010.04.032
- (2010) Solid-State Electron. , vol.54 , pp. 861
- Baudot, S.¹ Andrieu, F.² Faynot, O.³ Eymery, J.⁴

4
- 77956988478
- 10.1146/annurev-matsci-070909-104448
- O. Moutanabbir and U. Gsele, Annu. Rev. Mater. Res. 40, 469 (2010). 10.1146/annurev-matsci-070909-104448
- (2010) Annu. Rev. Mater. Res. , vol.40 , pp. 469
- Moutanabbir, O.¹ Gsele, U.²

5
- 63149124328
- 10.1149/1.2982883
- M. Reiche, O. Moutanabbir, C. Himcinschi, S. Christiansen, W. Erfurth, U. Gsele, S. Mantl, D. Buca, Q. T. Zhao, R. Loo, D. Nguyen, F. Muster, and M. Petzold, ECS Trans. 16, 311 (2008). 10.1149/1.2982883
- (2008) ECS Trans. , vol.16 , pp. 311
- Reiche, M.¹ Moutanabbir, O.² Himcinschi, C.³ Christiansen, S.⁴ Erfurth, W.⁵ Gsele, U.⁶ Mantl, S.⁷ Buca, D.⁸ Zhao, Q.T.⁹ Loo, R.¹⁰ Nguyen, D.¹¹ Muster, F.¹² Petzold, M.¹³

6
- 0037566742
- 10.1063/1.1558223
- C. K. Celler and S. Cristoloveanu, J. Appl. Phys. 93, 4955 (2003). 10.1063/1.1558223
- (2003) J. Appl. Phys. , vol.93 , pp. 4955
- Celler, C.K.¹ Cristoloveanu, S.²

7
- 0000806531
- 10.1063/1.362678
- S. C. Jain, H. E. Maes, K. Pinardi, and I. De Wolf, J. Appl. Phys. 79, 8145 (1996). 10.1063/1.362678
- (1996) J. Appl. Phys. , vol.79 , pp. 8145
- Jain, S.C.¹ Maes, H.E.² Pinardi, K.³ De Wolf, I.⁴

8
- 77953505985
- 10.1063/1.3449135
- O. Moutanabbir, M. Reiche, A. Hhnel, W. Erfurth, M. Motohashi, A. Tarun, N. Hayazawa, and S. Kawata, Appl. Phys. Lett. 96, 233105 (2010). 10.1063/1.3449135
- (2010) Appl. Phys. Lett. , vol.96 , pp. 233105
- Moutanabbir, O.¹ Reiche, M.² Hhnel, A.³ Erfurth, W.⁴ Motohashi, M.⁵ Tarun, A.⁶ Hayazawa, N.⁷ Kawata, S.⁸

9
- 0037475111
- 10.1063/1.1565181
- A. Armigliato, R. Balboni, G. P. Carnevale, G. Pavia, D. Piccolo, S. Frabboni, A. Benedetti, and A. G. Cullis, Appl. Phys. Lett. 82, 2172 (2003). 10.1063/1.1565181
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2172
- Armigliato, A.¹ Balboni, R.² Carnevale, G.P.³ Pavia, G.⁴ Piccolo, D.⁵ Frabboni, S.⁶ Benedetti, A.⁷ Cullis, A.G.⁸

10
- 22944490862
- 10.1063/1.1938277
- C. E. Murray, H. F. Yan, I. C. Noyan, Z. Cai, and B. Lai, J. Appl. Phys. 98, 013504 (2005). 10.1063/1.1938277
- (2005) J. Appl. Phys. , vol.98 , pp. 013504
- Murray, C.E.¹ Yan, H.F.² Noyan, I.C.³ Cai, Z.⁴ Lai, B.⁵

11
- 0032606906
- 10.1063/1.124513
- G. M. Cohen, P. M. Mooney, E. C. Jones, K. K. Chan, P. M. Solomon, and H.-S. P. Wong, Appl. Phys. Lett. 75, 787 (1999). 10.1063/1.124513
- (1999) Appl. Phys. Lett. , vol.75 , pp. 787
- Cohen, G.M.¹ Mooney, P.M.² Jones, E.C.³ Chan, K.K.⁴ Solomon, P.M.⁵ Wong, H.-S.P.⁶

12
- 33947319977
- 10.1063/1.2713335
- M. Gailhanou, A. Loubens, J.-S. Micha, B. Charlet, A. A. Minkevich, R. Fortunier, and O. Thomas, Appl. Phys. Lett. 90, 111914 (2007). 10.1063/1.2713335
- (2007) Appl. Phys. Lett. , vol.90 , pp. 111914
- Gailhanou, M.¹ Loubens, A.² Micha, J.-S.³ Charlet, B.⁴ Minkevich, A.A.⁵ Fortunier, R.⁶ Thomas, O.⁷

13
- 0344641991
- 10.1088/0022-3727/32/6/020
- T. Baumbach and D. Lbbert, J. Phys. D 32, 726 (1999). 10.1088/0022-3727/32/6/020
- (1999) J. Phys. D , vol.32 , pp. 726
- Baumbach, T.¹ Lbbert, D.²

14
- 77949686281
- 10.1063/1.3358149
- D. Cooper, A. Béché, J.-M. Hartmann, V. Carron, and J.-L Rouvire, Appl. Phys. Lett. 96, 113508 (2010). 10.1063/1.3358149
- (2010) Appl. Phys. Lett. , vol.96 , pp. 113508
- Cooper, D.¹ Béché, A.² Hartmann, J.-M.³ Carron, V.⁴ Rouvire, J.-L.⁵

15
- 63049089080
- 10.1038/nmat2400
- I. K. Robinson and R. Harder, Nature Mater. 8, 291 (2009). 10.1038/nmat2400
- (2009) Nature Mater. , vol.8 , pp. 291
- Robinson, I.K.¹ Harder, R.²

16
- 77951554686
- 10.1088/1367-2630/12/3/035019
- R. Harder, M. Liang, Y. Sun, Y. Xia, and I. K. Robinson, New J. Phys. 12, 035019 (2010). 10.1088/1367-2630/12/3/035019
- (2010) New J. Phys. , vol.12 , pp. 035019
- Harder, R.¹ Liang, M.² Sun, Y.³ Xia, Y.⁴ Robinson, I.K.⁵

17
- 79953793456
- 10.1088/1367-2630/13/3/033006
- G. Xiong, X. J. Huang, S. Leake, M. C. Newton, R. Harder, and I. K. Robinson, New J. Phys. 13, 033006 (2011). 10.1088/1367-2630/13/3/033006
- (2011) New J. Phys. , vol.13 , pp. 033006
- Xiong, G.¹ Huang, X.J.² Leake, S.³ Newton, M.C.⁴ Harder, R.⁵ Robinson, I.K.⁶

18
- 0004097995
- (Pergamon, Oxford).
- L. D. Landau and E. M. Lifshitz, Theory of Elasticity (Pergamon, Oxford, 1986).
- (1986) Theory of Elasticity
- Landau, L.D.¹ Lifshitz, E.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.