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Volumn 82, Issue 13, 2003, Pages 2172-2174
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Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices
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Author keywords
[No Author keywords available]
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Indexed keywords
FLASH MEMORY;
MICROSCOPES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICES;
STRAIN;
TRANSMISSION ELECTRON MICROSCOPY;
SILICON DEVICES;
ELECTRON DIFFRACTION;
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EID: 0037475111
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1565181 Document Type: Article |
Times cited : (63)
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References (13)
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