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Volumn 82, Issue 13, 2003, Pages 2172-2174

Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices

Author keywords

[No Author keywords available]

Indexed keywords

FLASH MEMORY; MICROSCOPES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; STRAIN; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0037475111     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1565181     Document Type: Article
Times cited : (63)

References (13)
  • 9
    • 0345266990 scopus 로고    scopus 로고
    • Johann-Krane-Weg 39, 48149 Munster, Germany
    • Soft Imaging System GmbH, Johann-Krane-Weg 39, 48149 Munster, Germany, http://www.soft-imaging.net
  • 10
    • 0344835637 scopus 로고    scopus 로고
    • STREAM Contract No. IST-1999-10341
    • STREAM Contract No. IST-1999-10341, http://stream.bo.cnr.it
  • 12
    • 0345698572 scopus 로고    scopus 로고
    • Deliverable D2
    • Deliverable D2, STREAM Project, p. 25 (2000), http://stream.bo.cnr.it
    • (2000) STREAM Project , pp. 25


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.