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Volumn 58, Issue 10, 2011, Pages 3529-3540

A fully analytical model for the series impedance of through-silicon vias with consideration of substrate effects and coupling with horizontal interconnects

Author keywords

3 D integrated circuits; Analytical impedance modeling; eddy currents; Green's function; high frequency; interconnect; quasi magnetostatic; substrate effects; through silicon via (TSV)

Indexed keywords

3-D INTEGRATED CIRCUIT; ANALYTICAL IMPEDANCE MODELING; HIGH FREQUENCY; INTERCONNECT; QUASI-MAGNETOSTATIC; SUBSTRATE EFFECTS; THROUGH-SILICON VIA (TSV);

EID: 80053187922     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2011.2162846     Document Type: Article
Times cited : (25)

References (23)
  • 1
    • 33747566850 scopus 로고    scopus 로고
    • 3-D ICs: A novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
    • May
    • K. Banerjee, S. J. Souri, P. Kapur, and K. C. Saraswat, "3-D ICs: A novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration," Proc. IEEE, vol. 89, no. 5, pp. 602-633, May 2001.
    • (2001) Proc. IEEE , vol.89 , Issue.5 , pp. 602-633
    • Banerjee, K.1    Souri, S.J.2    Kapur, P.3    Saraswat, K.C.4
  • 3
    • 64549130338 scopus 로고    scopus 로고
    • Enabling technologies for 3D integration: From packaging miniaturization to advanced stacked ICs
    • N. Sillon, A. Astier, H. Boutry, L. Di Cioccio, D. Henry, and P. Leduc, "Enabling technologies for 3D integration: From packaging miniaturization to advanced stacked ICs," in IEDM Tech. Dig., 2008, pp. 595-598.
    • (2008) IEDM Tech. Dig , pp. 595-598
    • Sillon, N.1    Astier, A.2    Boutry, H.3    Di Cioccio, L.4    Henry, D.5    Leduc, P.6
  • 7
    • 73349133689 scopus 로고    scopus 로고
    • Electrical modeling and characterization of through silicon via for three-dimensional ICs
    • Jan
    • G. Katti, M. Stucchi, K. De Meyer, andW. Dehaene, "Electrical modeling and characterization of through silicon via for three-dimensional ICs," IEEE Trans. Electron Devices, vol. 57, no. 1, pp. 256-262, Jan. 2010.
    • (2010) IEEE Trans. Electron Devices , vol.57 , Issue.1 , pp. 256-262
    • Katti, G.1    Stucchi, M.2    De Meyer, K.3    Dehaene, W.4
  • 8
    • 79951949566 scopus 로고    scopus 로고
    • Closed-form expressions for the resistance and the inductance of different profiles of through-silicon vias
    • Mar
    • Y. Liang and Y. Li, "Closed-form expressions for the resistance and the inductance of different profiles of through-silicon vias," IEEE Electron Device Lett., vol. 32, no. 3, pp. 393-395, Mar. 2011.
    • (2011) IEEE Electron Device Lett. , vol.32 , Issue.3 , pp. 393-395
    • Liang, Y.1    Li, Y.2
  • 9
    • 69549108427 scopus 로고    scopus 로고
    • Closed-form expressions of 3-D via resistance, inductance, and capacitance
    • Sep
    • I. Savidis and E. G. Friedman, "Closed-form expressions of 3-D via resistance, inductance, and capacitance," IEEE Trans. Electron Devices, vol. 56, no. 9, pp. 1873-1881, Sep. 2009.
    • (2009) IEEE Trans. Electron Devices , vol.56 , Issue.9 , pp. 1873-1881
    • Savidis, I.1    Friedman, E.G.2
  • 10
    • 51249113887 scopus 로고    scopus 로고
    • Electrical characterization of through silicon via (TSV) depending on structural and material parameters based on 3D full wave simulation
    • J. S. Pak, C. Ryu, and J. Kim, "Electrical characterization of through silicon via (TSV) depending on structural and material parameters based on 3D full wave simulation," in Proc. Int. Conf. Electron. Mater. Packag., 2007, pp. 1-6.
    • (2007) Proc. Int. Conf. Electron. Mater. Packag , pp. 1-6
    • Pak, J.S.1    Ryu, C.2    Kim, J.3
  • 11
    • 77952342642 scopus 로고    scopus 로고
    • Compact AC modeling and analysis of Cu, W, and CNT based through-silicon vias (TSVs) in 3-D ICs
    • C. Xu, H. Li, R. Suaya, and K. Banerjee, "Compact AC modeling and analysis of Cu, W, and CNT based through-silicon vias (TSVs) in 3-D ICs," in IEDM Tech. Dig., 2009, pp. 521-524.
    • (2009) IEDM Tech. Dig , pp. 521-524
    • Xu, C.1    Li, H.2    Suaya, R.3    Banerjee, K.4
  • 12
    • 78650018928 scopus 로고    scopus 로고
    • Compact AC modeling and performance analysis of through-silicon vias in 3-D ICs
    • Dec
    • C. Xu, H. Li, R. Suaya, and K. Banerjee, "Compact AC modeling and performance analysis of through-silicon vias in 3-D ICs," IEEE Trans. Electron Devices, vol. 57, no. 12, pp. 3405-3417, Dec. 2010.
    • (2010) IEEE Trans. Electron Devices , vol.57 , Issue.12 , pp. 3405-3417
    • Xu, C.1    Li, H.2    Suaya, R.3    Banerjee, K.4
  • 14
    • 67650895067 scopus 로고    scopus 로고
    • Analytical expressions for high-frequency VLSI interconnect impedance extraction in the presence of a multilayer conductive substrate
    • Jul
    • N. Srivastava, R. Suaya, and K. Banerjee, "Analytical expressions for high-frequency VLSI interconnect impedance extraction in the presence of a multilayer conductive substrate," IEEE Trans. Comput.-Aided Design Integr. Circuits Syst., vol. 28, no. 7, pp. 1047-1060, Jul. 2009.
    • (2009) IEEE Trans. Comput.-Aided Design Integr. Circuits Syst. , vol.28 , Issue.7 , pp. 1047-1060
    • Srivastava, N.1    Suaya, R.2    Banerjee, K.3
  • 15
    • 77951691279 scopus 로고    scopus 로고
    • Corrections to 'analytical expressions for high-frequency VLSI interconnect impedance extraction in the presence of a multilayer conductive substrate'
    • May
    • N. Srivastava, C. Xu, R. Suaya, and K. Banerjee, "Corrections to 'analytical expressions for high-frequency VLSI interconnect impedance extraction in the presence of a multilayer conductive substrate'," IEEE Trans. Comput.-Aided Design Integr. Circuits Syst., vol. 29, no. 5, p. 849, May 2010.
    • (2010) IEEE Trans. Comput.-Aided Design Integr. Circuits Syst. , vol.29 , Issue.5 , pp. 849
    • Srivastava, N.1    Xu, C.2    Suaya, R.3    Banerjee, K.4
  • 16
    • 77953087280 scopus 로고    scopus 로고
    • Efficient 3D high-frequency impedance extraction for general interconnects and inductors above a layered substrate
    • N. Srivastava, R. Suaya, and K. Banerjee, "Efficient 3D high-frequency impedance extraction for general interconnects and inductors above a layered substrate," in Proc. Des. Test Eur., 2010, pp. 459-464.
    • Proc. Des. Test Eur. , vol.2010 , pp. 459-464
    • Srivastava, N.1    Suaya, R.2    Banerjee, K.3
  • 17
    • 0026208608 scopus 로고
    • Discrete complex images of a three-dimensional dipole above and within a lossy ground
    • Aug
    • J. J. Yang, D. G. Fang, and Y. L. Chow, "Discrete complex images of a three-dimensional dipole above and within a lossy ground," IEE Proc. H, vol. 138, no. 4, pp. 319-326, Aug. 1991.
    • (1991) IEE Proc. H , vol.138 , Issue.4 , pp. 319-326
    • Yang, J.J.1    Fang, D.G.2    Chow, Y.L.3
  • 18
    • 34548354633 scopus 로고    scopus 로고
    • PFFT in FastMaxwell: A fast impedance extraction solver for 3D conductor structures over substrate
    • T. Moselhy, X. Hu, and L. Daniel, "pFFT in FastMaxwell: A fast impedance extraction solver for 3D conductor structures over substrate," in Proc. Des., Autom. Test Eur., 2007, pp. 1-6.
    • (2007) Proc. Des., Autom. Test Eur , pp. 1-6
    • Moselhy, T.1    Hu, X.2    Daniel, L.3
  • 19
    • 78651326478 scopus 로고    scopus 로고
    • Electromagnetic modeling of through-silicon via (TSV) interconnections using cylindrical modal basis functions
    • Nov
    • K. J. Han, M. Swaminathan, and T. Bandyopadhyay, "Electromagnetic modeling of through-silicon via (TSV) interconnections using cylindrical modal basis functions," IEEE Trans. Adv. Packag., vol. 33, no. 4, pp. 804-817, Nov. 2010.
    • (2010) IEEE Trans. Adv. Packag. , vol.33 , Issue.4 , pp. 804-817
    • Han, K.J.1    Swaminathan, M.2    Bandyopadhyay, T.3
  • 21
    • 0031098726 scopus 로고    scopus 로고
    • Multilayered media Green's functions in integral equation formulations
    • Mar
    • K. A. Michalski and J. R. Mosig, "Multilayered media Green's functions in integral equation formulations," IEEE Trans. Antennas Propag., vol. 45, no. 3, pp. 508-519, Mar. 1997.
    • (1997) IEEE Trans. Antennas Propag. , vol.45 , Issue.3 , pp. 508-519
    • Michalski, K.A.1    Mosig, J.R.2
  • 22
    • 0025401286 scopus 로고
    • Electromagnetic scattering and radiation by surfaces of arbitrary shape in layered media, Part I: Theory
    • Mar
    • K. A. Michalski and D. Zheng, "Electromagnetic scattering and radiation by surfaces of arbitrary shape in layered media, Part I: Theory," IEEE Trans. Antennas Propag., vol. 38, no. 3, pp. 335-344, Mar. 1990.
    • (1990) IEEE Trans. Antennas Propag. , vol.38 , Issue.3 , pp. 335-344
    • Michalski, K.A.1    Zheng, D.2
  • 23
    • 80053206764 scopus 로고    scopus 로고
    • Maxwell Student Version. [Online]. Available
    • Maxwell Student Version. [Online]. Available: www.ansoft.com/ academic/


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.