Silicon carbide-based remote wireless optical pressure sensor

IEEE Photonics Technology Letters

Volumn 19, Issue 7, 2007, Pages 504-506

  Riza, Nabeel A ^a,b   Ghauri, Farzan ^a   Perez, Frank ^a  

^a Nuonics Inc   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Optical sensors; Pressure sensors

Indexed keywords

LASER BEAMS; LIGHT REFLECTION; MIRRORS; OPTICAL SENSORS; SEMICONDUCTING SILICON COMPOUNDS; SINGLE CRYSTALS;

CONVEX MIRROR; REMOTED FREE-SPACE OPTICAL BEAM; SILICON CARBIDE CHIP; WIRELESS OPTICAL SENSOR;

PRESSURE SENSORS;

EID: 34047242964     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.893752     Document Type: Article

References (11)

1. Y. Kim and D. P. Neikirk, "Micromachined Fabry-Pérot cavity pressure transducer," IEEE Photon. Technol. Lett., vol. 7, no. 12, pp 1471-1473, Dec. 1995.
2. W. Pulliam, P. Russler, R. Mlcak, K. Murphy, and C. Kozikowski, "Micromachined SiC fiber-optic pressure sensors for high temperature aerospace applications," in SPIE Proc., A. Wang and E. Udd, Eds., Dec. 2000, vol. 4202, Industrial Sensing Systems, pp. 21-30.
3. T. Guo, Q. Zhao, H. Zhang, C. Zhang, G. Huang, L. Xue, and X. Dong, "Temperature-insensitive fiber Bragg grating dynamic pressure sensing system," Opt. Lett., vol. 31, pp. 2269-2271, Aug. 2006.
4. W. J. Wang, R. M. Lin, D. G. Guo, and T. T. Sun, "Development of a novel Fabry-Pérot pressure microsensor," Sens. Actuators A, Phys., vol. 116, no. 1, pp. 59-65, Oct. 2004.
5. Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, "High-temperature fiber-tip pressure sensor," J. Lightw. Technol., vol. 24, no. 2, pp. 861-869, Feb. 2006.
6. A. Dehennis and K. D. Wise, "A double-sided single-chip wireless pressure sensor," in 15th IEEE Int. Conf. MEMS, Las Vegas, NV, Jan. 2002, pp. 252-255.
7. G. Schimetta, F. Dollinger, and R. Weigel, "A wireless pressure-measurement system using a SAW hybrid sensor," IEEE Trans. Microw. Theory Tech., vol. 48, no. 12, pp. 2730-2735, Dec. 2000.
8. N. A. Riza, M. A. Arain, and F. Perez, "Harsh environments minimally invasive optical sensor using freespace targeted single crystal silicon carbide," IEEE Sensors J., vol. 6, no. 3, pp. 672-685, Jun. 2006.
9. N. A. Riza, F. N. Ghauri, and F. Perez, "Hybrid optical sensor using laser targeting," in Proc. SPIE Optical Sensing II, Int. Photonics Eur. Conf., B. Culshaw and A. Mignani, Eds., Strasbourg, France, Apr. 3, 2006, vol. 6189, Invited Paper 4.
10. N. A. Riza, F. N. Ghauri, and F. Perez, "Wireless pressure sensor using laser targeting of silicon carbide," Opt. Eng. (SPIE), vol. 46, no. 1, p. 014401, Jan. 2007.
11. N. A. Riza, M. A. Arain, and F. Perez, "6-H single-crystal silicon carbide thermo-optic coefficient measurements for ultrahigh temperatures up to 1273 K in the telecommunications infrared band," J. Appl. Phys., vol. 98, pp. 103512-103516, Nov. 2005.