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Volumn 49, Issue 3, 2010, Pages 652-662
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Computational investigation of van der Pauw structures for MEMS pressure sensors
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Author keywords
MEMS; Pressure sensor; Van der Pauw
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Indexed keywords
BIAXIAL STRESS;
COMPUTATIONAL INVESTIGATION;
CONSTANT THICKNESS;
ELECTRICAL CONTACTS;
FINITE DIFFERENCE;
FINITE ELEMENT ANALYSIS;
FUTURE APPLICATIONS;
ISOTROPIC AND ANISOTROPIC MATERIALS;
MEMS PRESSURE SENSOR;
PIEZORESISTIVE SENSORS;
PIEZOTRANSDUCER;
RESISTANCE CHANGE;
SENSING DEVICES;
SMALL AREA;
TEST STRUCTURE;
TYPE STRUCTURES;
VAN DER PAUW;
COST REDUCTION;
FILAMENTS (LAMP);
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
RESISTORS;
SERPENTINE;
SILICATE MINERALS;
FINITE ELEMENT METHOD;
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EID: 77955467507
PISSN: 09270256
EISSN: None
Source Type: Journal
DOI: 10.1016/j.commatsci.2010.06.008 Document Type: Article |
Times cited : (7)
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References (21)
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