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Volumn 49, Issue 3, 2010, Pages 652-662

Computational investigation of van der Pauw structures for MEMS pressure sensors

Author keywords

MEMS; Pressure sensor; Van der Pauw

Indexed keywords

BIAXIAL STRESS; COMPUTATIONAL INVESTIGATION; CONSTANT THICKNESS; ELECTRICAL CONTACTS; FINITE DIFFERENCE; FINITE ELEMENT ANALYSIS; FUTURE APPLICATIONS; ISOTROPIC AND ANISOTROPIC MATERIALS; MEMS PRESSURE SENSOR; PIEZORESISTIVE SENSORS; PIEZOTRANSDUCER; RESISTANCE CHANGE; SENSING DEVICES; SMALL AREA; TEST STRUCTURE; TYPE STRUCTURES; VAN DER PAUW;

EID: 77955467507     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.commatsci.2010.06.008     Document Type: Article
Times cited : (7)

References (21)
  • 13
    • 77955471958 scopus 로고    scopus 로고
    • Sensitivity of (1 0 0) silicon VDP sensors to uniaxial and hydrostatic loads
    • A. Mian, J.C. Suhling, R.C. Jaeger, Sensitivity of (1 0 0) silicon VDP sensors to uniaxial and hydrostatic loads, in: Proceedings of SECTAM-XX, 2000.
    • (2000) Proceedings of SECTAM-XX
    • Mian, A.1    Suhling, J.C.2    Jaeger, R.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.