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Volumn 7133, Issue , 2009, Pages

Development of high-temperature piezoresistive pressure sensor based silicon on insulator

Author keywords

High temperature; Piezoresistive pressure sensor; Soi structure

Indexed keywords

GAGES; ION BOMBARDMENT; ION IMPLANTATION; MEMS; OXYGEN; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SINGLE CRYSTALS;

EID: 62449248284     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.807589     Document Type: Conference Paper
Times cited : (2)

References (6)
  • 1
    • 0029213852 scopus 로고
    • SOI 'SIMOX' from bulk to surface micromachining, a new age for silicon sensors and actuators
    • Diem B., Rey P., "SOI 'SIMOX' from bulk to surface micromachining, a new age for silicon sensors and actuators," Sensors and Actuators, A 46-47:8-17(1995).
    • (1995) Sensors and Actuators, A , vol.46-47 , pp. 8-17
    • Diem, B.1    Rey, P.2
  • 6
    • 62449118056 scopus 로고    scopus 로고
    • Sun Yicai, Liu Yuling, Meng Qinghao, [Design, fabrication and application of pressure sensor], Metallurgy Industry Press, Beijing, 29-35(2000).
    • Sun Yicai, Liu Yuling, Meng Qinghao, [Design, fabrication and application of pressure sensor], Metallurgy Industry Press, Beijing, 29-35(2000).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.