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Volumn 7133, Issue , 2009, Pages
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Development of high-temperature piezoresistive pressure sensor based silicon on insulator
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Author keywords
High temperature; Piezoresistive pressure sensor; Soi structure
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Indexed keywords
GAGES;
ION BOMBARDMENT;
ION IMPLANTATION;
MEMS;
OXYGEN;
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
SINGLE CRYSTALS;
ACTIVE MATERIALS;
ANISOTROPIC WET ETCHINGS;
APPLIED PRESSURES;
FINITE ELEMENTS;
HIGH TEMPERATURE;
METAL ELECTRODES;
MULTI-LAYERS;
NON LINEARITIES;
PIEZORESISTIVE DETECTIONS;
PIEZORESISTIVE PRESSURE SENSOR;
PRESSURE GAUGES;
SILICON ON INSULATORS;
SILICON-ON-INSULATOR SUBSTRATES;
SINGLE CRYSTAL SILICONS;
SOI STRUCTURE;
TEST RESULTS;
SILICON WAFERS;
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EID: 62449248284
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.807589 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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