Capacitive pressure sensor with very large dynamic range

IEEE Transactions on Components and Packaging Technologies

Volumn 33, Issue 1, 2010, Pages 79-83

  Bakhoum, Ezzat G ^a   Cheng, Marvin H M ^b  

^a UNIVERSITY OF WEST FLORIDA   (United States)

^b GEORGIA SOUTHERN UNIVERSITY   (United States)

Author keywords

Capacitive pressure sensor; Pressure sensor; Sensor dynamic range

Indexed keywords

CAPACITIVE PRESSURE SENSOR; CAPACITIVE PRESSURE SENSORS; DYNAMIC RANGE; INTER-ELECTRODE SPACING; PRESSURE RANGES; PROTOTYPE DEVICES; SENSOR DYNAMIC; SURFACE AREA;

PARTIAL PRESSURE SENSORS; PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 77949570747     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2009.2022949     Document Type: Article

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