Influence of oxygen addition on the crystal shape of CVD boron doped diamond

Physica Status Solidi (A) Applications and Materials Science

Volumn 208, Issue 9, 2011, Pages 2023-2027

  Issaoui, R ^a   Achard, J ^a   Silva, F ^a   Tallaire, A ^a   Mille, V ^a   Gicquel, A ^a  

^a CNRS   (France)

Author keywords

boron doping; crystal morphology; growth parameters; oxygen addition; thick films

Indexed keywords

BORON DOPED DIAMOND; BORON-DOPING; CRYSTAL GROWTH MODEL; CRYSTAL MORPHOLOGIES; CRYSTAL MORPHOLOGY; CRYSTAL SHAPES; DIAMOND BASED DEVICES; DIBORANE GAS; DISPLACEMENT SPEED; FEED GAS; GROWTH PARAMETERS; HIGH POWER ELECTRONIC APPLICATIONS; INFLUENCE OF OXYGEN; OXYGEN ADDITION; THREE PARAMETERS; TOP SURFACE;

BORON; CRYSTAL GROWTH; DIFFRACTIVE OPTICS; FILM GROWTH; MORPHOLOGY; OXYGEN; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; THICK FILMS; THREE DIMENSIONAL;

DIAMONDS;

EID: 80052431240     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201100045     Document Type: Article

References (19)

1. J. Isberg, J. Hammersberg, E. Johansson, T. Wikstrom, D. J. Twitchen, A. J. Whitehead, S. E. Coe, and, G. A. Scarsbrook, Science 297 (5587), 1670-1672 (2002).
2. H. Pernegger, Phys. Status Solidi A 203 (13), 3299-3314 (2006).
3. Y. Garino, T. Teraji, S. Koizumi, Y. Koide, and, T. Ito, Phys. Status Solidi A 206 (9), 2082-2085 (2009).
4. H. Umezawa, K. Ikeda, N. Tatsumi, K. Ramanujam, and, S-i. Shikata, Diamond Relat. Mater. 18 (9), 1196-1199 (2009).
5. R. Kumaresan, H. Umezawa, N. Tatsumi, K. Ikeda, and, S. Shikata, Diamond Relat. Mater. 18 (2-3), 299-302.
6. H. Shiomi, Y. Nishibayashi, and, N. Fujimori, Jpn. J. Appl. Phys. 29 (12), L2163-L2164 (1990).
7. W. Ebert, A. Vescan, P. Glusche, T. Borst, and, E. Kohn, Diamond Relat. Mater. 6, 329-332 (1997).
8. J. E. Butler, M. W. Geis, K. E. Krohn, J. Lawless, S. Deneault, T. M. Lyszczarz, D. Flechtner, and, R. Wright, Semicond. Sci. Technol. 18 (3), S67-S71 (2003).
9. J. Achard, F. Silva, R. Issaoui, O. Brinza, A. Tallaire, H. Schneider, K. Isoird, H. Ding, S. Koné, M. A. Pinault, F. Jomard, and, A. Gicquel, Diamond Relat. Mater. 20 (2), 145-152.
10. F. Silva, X. Bonnin, J. Achard, O. Brinza, A. Michau, and, A. Gicquel, J. Cryst. Growth. 310, 187-203 (2008).
11. F. Silva, J. Achard, X. Bonnin, A. Michau, A. Tallaire, O. Brinza, and, A. Gicquel, Phys. Status Solidi A 203 (12), 3049-3055 (2006).
12. F. Silva, J. Achard, X. Bonnin, O. Brinza, A. Michau, A. Secroun, K. De Corte, S. Felton, M. Newton, and, A. Gicquel, Diamond Relat. Mater. 17 (7-10), 1067-1075 (2008).
13. O. Brinza, J. Achard, F. Silva, X. Bonnin, P. Barroy, K. De Corte, and, A. Gicquel, Phys. Status Solidi A 205 (9), 2114-2120 (2008).
14. A. Tallaire, J. Achard, F. Silva, and, A. Gicquel, Phys. Status Solidi A 202 (11), 2059-2065 (2005).
15. Y. A. Mankelevich, M. N. R. Ashfold, D. W. Comerford, J. Ma, and, J. C. Richley, Thin Solid Films 519 (14), 4421-4425 (2011).
16. M. Wade, P. Muret, F. Omnes, and, A. Deneuville, Diamond Relat. Mater. 15 (4-8), 614-617 (2006).
17. M. Kasu, T. Makimoto, W. Ebert, and, E. Kohn, Appl. Phys. Lett. 83 (17), 3465-3467 (2003).
18. C. Wild, R. Kohl, N. Herres, W. Muller-Sebert, and, P. Koidl, Diamond Relat. Mater. 3 (4-6), 373-381 (1994).
19. R. Issaoui, J. Achard, F. Silva, A. Tallaire, M.-A. Pinault, F. Jomard, and, A. Gicquel, Diamond Relat. Mater. (2011) (submitted).