Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

Journal of Materials Science and Technology

Volumn 27, Issue 8, 2011, Pages 696-700

  Srivatsa, K M K ^a   Chhikara, Deepak ^a   Kumar, M Senthil ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

Anatase titania; Nanostructures; Plasma enhanced chemical vapor deposition

Indexed keywords

ANATASE TITANIA; CHEMICAL COMPOSITIONS; CHEMICAL PURITY; COMB-LIKE STRUCTURES; DEPOSITION PRESSURES; ENERGY DISPERSIVE X-RAY; FOURIER TRANSFORM INFRARED; FTIR MEASUREMENTS; GROWTH MECHANISMS; OXYGEN MIXTURES; ROOM TEMPERATURE; SILICON (100); TITANIA; TITANIA NANOSTRUCTURES; TITANIUM TETRAISOPROPOXIDE;

ARGON; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORMS; NANOSTRUCTURES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; TITANIUM; X RAY DIFFRACTION;

TITANIUM DIOXIDE;

EID: 80052415921     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(11)60128-X     Document Type: Article

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