Preparation of large surface area rutile titania crystals at room temperature by PECVD with applied d.c. bias

Materials Letters

Volumn 62, Issue 20, 2008, Pages 3527-3529

  Srivatsa, K M K ^a   Bera, Mrinmoyee ^a   Basu, A ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

PECVD; Rutile titania crystals; Substrate bias

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE CHEMISTRY; X RAY DIFFRACTION;

OXYGEN MIXTURES; RUTILE TITANIA CRYSTALS; SUBSTRATE BIAS;

TITANIUM COMPOUNDS;

EID: 44349103620     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.03.035     Document Type: Article

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