Intrinsically switchable, BST-on-silicon composite FBARs

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2011, Pages

  Sis, Seyit A ^a   Lee, Victor ^a   Mortazawi, Amir ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

acoustically coupled filters; Barium stronium titanate; FBAR resonators; ferroelectric devices; intrinsically switchable devices; radio frequency (RF) microelectromechanical systems (RF MEMS)

Indexed keywords

ACOUSTICALLY COUPLED FILTERS; BULK ACOUSTIC WAVES; COMPOSITE THIN FILMS; DC BIAS; DC VOLTAGE; FBAR RESONATORS; PARALLEL RESONANCE; QUALITY FACTORS; RADIO FREQUENCIES; SWITCHABLE; THICKNESS MODES;

ACOUSTIC SURFACE WAVE FILTERS; BARIUM; BARIUM TITANATE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE ACOUSTICS; RESONANCE; RESONATORS;

BARIUM STRONTIUM TITANATE;

EID: 80052341868     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2011.5972960     Document Type: Conference Paper

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