Intrinsically switchable interdigitated barium titanate thin film contour mode resonators

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2010, Pages 1448-1450

  Lee, Victor ^a   Sis, Seyit A ^a   Zhu, Xinen ^b   Mortazawi, Amir ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Barium titanate; Ferroelectric devices; Interdigitated contour mode resonators; Intrinsically switchable; Microelectromechanical systems (MEMS); Radio frequency (RF)

Indexed keywords

BARIUM TITANATE THIN FILMS; CONTOUR-MODE RESONATORS; DC BIAS; MEASUREMENT RESULTS; MICROELECTROMECHANICAL SYSTEMS; PARALLEL RESONANCE; QUALITY FACTORS; RADIO-FREQUENCY (RF); SWITCHABLE;

BARIUM; COMPOSITE MICROMECHANICS; FERROELECTRIC DEVICES; FERROELECTRICITY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONANCE; RESONATORS; THIN FILMS;

BARIUM TITANATE;

EID: 77957793050     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2010.5517816     Document Type: Conference Paper

References (5)

1. Thales Communications, Inc., http://www.thalescomminc.com
2. X. Zhu, V. Lee, J. Phillips, and A. Mortazawi, "An Intrinsically Switchable FBAR Filter Based on Barium Titanate Thin Films," Microwave and Wireless Components Letters, IEEE , vol.19, no.6, pp.359-361, June 2009.
3. X. Zhu, V. Lee, J. Phillips, and A. Mortazawi, "Intrinsically switchable contour mode acoustic wave resonators based on barium titanate thin films," Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International, vol., no., pp.93-96, 7-12 June 2009.P.J.
4. G. Piazza, P.J. Stephanou, A.P. Pisano, "Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators," Microelectromechanical Systems, Journal of , vol.15, no.6, pp.1406-1418, Dec. 2006. (Pubitemid 44921759)
5. Stephanou, A.P. Pisano, "PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators," Ultrasonics Symposium, 2006. IEEE, vol., no., pp.2401-2404, 2-6 Oct. 2006.