Monolithic thin-film piezoelectric-on-substrate filters

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 509-512

  Abdolvand, Reza ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Channel select filters; Filter Q; Monolithic filter; Thin film piezoelectric

Indexed keywords

MICROSTRUCTURE; PIEZOELECTRIC DEVICES; RESONANCE; THIN FILMS;

ACOUSTIC LOSS; CHANNEL-SELECT FILTERS; MECHANICAL COUPLING; MONOLITHIC FILTER; THIN-FILM PIEZOELECTRIC;

WAVE FILTERS;

EID: 34748834129     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380519     Document Type: Conference Paper

References (4)

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2. Lakin, K.M., "Coupled resonator filters," Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.1, no.pp. 901-908 vol.1, 8-11 Oct. 2002.
3. G. K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, and F. Ayazi, "Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators," accepted for publication in Journal of Microelectromechanical Systems, 2007.
4. "IEEE recommended practice for local and metropolitan area networks. Coexistence of fixed broadband wireless access systems," IEEE Std. 802.16.2-2004 (Revision of IEEE Std 802.16.2-2001), 2004.