Intrinsically switchable contour mode acoustic wave resonators based on barium titanate thin films

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2009, Pages 93-96

  Zhu, Xinen ^a   Lee, Victor ^a   Phillips, Jamie ^a   Mortazawi, Amir ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Barium titanate; Contour mode resonators; Electrostriction; Ferroelectric devices; Radio frequency (RF) microelectromechanical systems (MEMS)

Indexed keywords

ACOUSTIC RESONANCE; ACOUSTIC WAVE RESONATORS; BARIUM TITANATE THIN FILMS; CONTOUR MODE; CONTOUR-MODE RESONATORS; DC BIAS VOLTAGE; LATERAL DIMENSION; MICROELECTROMECHANICAL SYSTEMS; PARALLEL RESONANCE; QUALITY FACTORS; RADIO FREQUENCIES; RESONANCE FREQUENCIES; SWITCHABLE;

ACOUSTIC RESONATORS; ACOUSTIC WAVES; ACOUSTICS; BARIUM; COMPOSITE MICROMECHANICS; ELECTROSTRICTION; FERROELECTRIC DEVICES; FERROELECTRIC MATERIALS; FERROELECTRICITY; INSULATING MATERIALS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; NATURAL FREQUENCIES; RESONATORS; THIN FILMS;

BARIUM TITANATE;

EID: 77949943217     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2009.5165640     Document Type: Conference Paper

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