Tunable BaxSr1-xTiO3 FBARs based on SiO2/W Bragg reflectors

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2010, Pages 1444-1447

  Vorobiev, A ^a   Gevorgian, S ^a,b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Ericsson Microwave Systems AB   (Sweden)

Author keywords

Ferroelectric; Tunable FBAR

Indexed keywords

FERROELECTRIC; FILM BULK ACOUSTIC-WAVE RESONATORS; HIGH DEPOSITION TEMPERATURE; HIGH-RESISTIVITY SUBSTRATE; PARAELECTRIC PHASE; Q-FACTORS; TIO; TUNABILITIES; TUNABLE FBAR;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTICS; BARIUM; BRAGG REFLECTORS; FERROELECTRICITY; REFLECTION; SILICON COMPOUNDS;

FERROELECTRIC FILMS;

EID: 77957812161     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2010.5517889     Document Type: Conference Paper

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