Plasma-aided hydrogenation and Al-doping: Increasing the conductivity and optical transparency of ZnO transparent conducting oxide

Applied Surface Science

Volumn 257, Issue 23, 2011, Pages 9986-9990

  Ong, T ^a   Xu, L ^a   Van Der Laan, T A ^b,c   Xu, S ^a   Ostrikov, K ^b,c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF SYDNEY   (Australia)

^c CSIRO   (Australia)

Author keywords

Magnetron; Oxide materials; Plasma nanoscience

Indexed keywords

ALUMINUM COMPOUNDS; CONDUCTIVE FILMS; DEPOSITION; HYDROGEN; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; MAGNETRONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; TRANSPARENCY; TRANSPARENT CONDUCTING OXIDES; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ELECTRICAL , OPTICAL AND STRUCTURAL PROPERTIES; ELECTRONIC AND OPTICAL PROPERTIES; HALL EFFECT MEASUREMENT; HYDROGEN INCORPORATION; LOW SUBSTRATE TEMPERATURE; OPTICAL TRANSMISSION SPECTROSCOPY; OXIDE MATERIALS; TRANSPARENT CONDUCTIVE THIN FILMS;

PLASMA DIAGNOSTICS;

EID: 80051793445     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.06.121     Document Type: Article

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