On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering

Chemical Physics Letters

Volumn 287, Issue 5-6, 1998, Pages 731-736

  Xu, S ^a   Li, Han shi ^a   Li, Yin an ^a   Lee, S ^a   Huan, C H A ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032495951     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(98)00227-9     Document Type: Article

References (18)

1. Liu A.Y., Cohen M.L. Science. 245:1989;8419.
2. Cohen M.L. Phys. Rev. B. 32:1985;7988.
3. Liu A.Y., Cohen M.L. Phys. Rev. B. 41:1990;10727.
4. Niu C., Lu Y.Z., Lieber C.M. Science. 261:1993;334.
5. Yu K.M., Cohen M.L., Haller E.E., Hansen W.L., Liu A.Y., Wu I.C. Phys. Rev. B. 49:1994;5034.
6. Li Y.-A., Zhang Z.-B., Xie S.-S., Yang G.-Z. Chem. Phys. Lett. 247:1995;253.
7. Zhang Y., Zhou Z., Li H. Appl. Phys. Lett. 68:1996;634.
8. Su X.W., Song H.W., Cui F.Z., Li W.Z. J. Phys.: Condens. Matter. 7:1995;L517.
9. Sjöström H., Hultman L., Sundgren J.-E., Hainsworth S.V., Page T.F., Theunissen G.S.A.M. J. Vac. Sci. Technol. A. 14(1):1996;56.
10. Matsui T., Yudasaka M., Kikuchi R., Ohki Y., Yoshimura S. Mater. Sci. Eng. B. 29:1995;220.
11. Marton D., Boyd K.J., Al-Bayati A.H., Todorov S.S., Rabalais J.W. Phys. Rev. Lett. 73:1994;118.
12. Tabbal M., Merel P., Moisa S., Chaker M., Ricard A., Moisan M. Appl. Phys. Lett. 69:1996;1698.
13. G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers: the Scienta ESCA300 Database (John Wiley, 1992).
14. Nilson O., Björneholm O., Tilbborg H., Hernnas B., Guest R.J., Sandel A., Martensson N. Surf. Sci. 287/288:1993;758.
15. D.R. Lide, Handbook of Chemistry and Physics, 74th edn., Vols. 10-275 (CRC Press, 1993-1994).
16. Reyes-Serrato A., Galvan D.H., Garzon I.L. Phys. Rev. B. 52:1995;6293.
17. Liu A.Y., Wentzcovitch R.M. Phys. Rev. B. 50:1994;10362.
18. Teter D.M., Hemley R.J. Science. 271:1996;53.