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Journal of the Electrochemical Society

Volumn 158, Issue 8, 2011, Pages

Detection of the tetragonal phase in atomic layer deposited La-doped ZrO2 thin films on germanium

(6) Wiemer, C a Lamperti, A a Lamagna, L a Salicio, O a Molle, A a Fanciulli, M a,b

a LABORATORIO MDM (Italy)

b UNIVERSITY OF MILANO BICOCCA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; ELECTRICAL ANALYSIS; GRAZING INCIDENCE; MONOCLINIC PHASIS; MONOCLINIC STRUCTURES; SI(0 0 1); TETRAGONAL PHASE;

ATOMIC LAYER DEPOSITION; CHEMICAL ANALYSIS; GERMANIUM; SYNCHROTRON RADIATION; THICK FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

ZIRCONIUM ALLOYS;

EID: 80051742514 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3600651 Document Type: Article

Times cited : (9)

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