Direct measurement and control of peak tapping forces in atomic force microscopy for improved height measurements

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Sikora, Andrzej ^a   Bednarz, Lukasz ^a  

^a ELECTROTECHNICAL INSTITUTE   (Poland)

Author keywords

AFM; atomic force microscopy; dynamic mode; height measurement; peak force feedback; time resolved tapping mode; torsional oscillations

Indexed keywords

FEEDBACK;

DYNAMIC MODES; HEIGHT MEASUREMENT; PEAK FORCE; TAPPING MODES; TORSIONAL OSCILLATION;

ATOMIC FORCE MICROSCOPY;

EID: 80051704115     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094005     Document Type: Article

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