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Journal of Sol-Gel Science and Technology

Volumn 59, Issue 1, 2011, Pages 117-127

Patterning of sol gel thin films by capillary force assisted soft lithographic technique

(6) Sil, Devika a,b Deb Roy, Rimlee a Jana, Sunirmal a Mukherjee, Rabibrata a,c Bhadra, Shyamal Kumar a Biswas, Prasanta Kumar a

a CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE (India)

b TEMPLE UNIVERSITY (United States)

c INDIAN INSTITUTE OF TECHNOLOGY (India)

Author keywords

AFM; Capillary force lithography; Patterning of thin films; PDMS; Sol gel processing

Indexed keywords

AFM; CAPILLARY FORCE LITHOGRAPHY; PATTERNING OF THIN FILMS; PDMS; SOL-GEL PROCESSING;

GELS; LITHOGRAPHY; METALLIC FILMS; MICROCHANNELS; SILICA; SILICONES; SOL-GEL PROCESS; SOLS; THIN FILMS; TITANIUM DIOXIDE;

FILM PREPARATION;

EID: 80051544681 PISSN: 09280707 EISSN: None Source Type: Journal
DOI: 10.1007/s10971-011-2469-9 Document Type: Article

Times cited : (9)

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