Art and practice to emboss gratings into sol-gel waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4284, Issue , 2001, Pages 80-87

  Szendro, I ^a  

^a MicroVacuum Ltd   (Hungary)

Author keywords

Biosensor; Embossing; Grating coupler sensor; Integrated optical sensors; OWLS; Sol gel; Waveguide

Indexed keywords

BIOSENSORS; HEAT TREATMENT; OPTICAL SENSORS; OPTICAL WAVEGUIDES; OXIDATION; SOL-GELS; SPIN COATING;

EMBOSSING;

DIFFRACTION GRATINGS;

EID: 0034937061     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.426859     Document Type: Conference Paper

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