Silicon micromachining sensors to systems

Analytical Chemistry

Volumn 68, Issue 13, 1996, Pages

  Kovacs, Gregory T A ^a,d   Petersen, Kurt ^b   Albin, Michael ^c,e,f  

^a STANFORD UNIVERSITY   (United States)

^b CEPHEID   (United States)

^c Perkin Elmer ^*

^d Stanford University ^*

^e Appl Biosystems Div Perkin Elmer

^f APPLIED BIOSYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001393424     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (31)

1. Petersen, K. E. IEEE Proc. 1982, 70, 420.
2. Bryzek, J.; Petersen, K.; McCulley, W. IEEE Spectrum 1994, 20-31.
3. Hornbeck, L. J. Proc. SPIE Int. Soc. Opt. Eng. 1990, 1150, 86.
4. Doyle, L. E. Manufacturing Processes and Materials for Engineers; Prentice Hall, Inc.: Englewood Cliffs, NJ, 1985.
5. Runyan, W. R.; Bean K. E. Semiconductor Integrated Circuit Processing Technology; Addison-Wesley: Reading, MA, 1990.
6. Electroless Plating: Fundamentals and Applications; Mallory, G. O.; Hajdu, J. B., Eds.; American Electroplaters and Surface Finishers Society: Orlando, FL, 1990.
7. Harrison, J. A.; Thompson, J. Electrochim. Acta 1973, 18, 829.
8. Westberg, H.; Boman, M.; Johansson, S.; Schweitz, J. A. J. Appl. Phys. 1993, 73, 7864.
9. Goldberg, H. D.; Brown, R. B.; Liu, D. P.; Meyerhoff, M. E. Sens. Actuators B 1994, 21, 171.
10. Wallis, G.; Pomerantz, D. I. J. Appl. Phys. 1969, 40, 3946.
11. Barth, P. W. Sens. Actuators 1990, A21-A23, 919.
12. Kumar, A.; Abbott, N. L.; Kim, E.; Biebuyck, H. A.; Whitesides, G. M. Acc. Chem. Res. 1995, 28, 219.
13. Beaucage, S. L.; Iyer, R. P. Tetrahedron 1992, 48, 2223.
14. Bean, K. E. IEEE Trans. Electron Devices 1978, ED-25, 1185.
15. Tabata, O.; Asahi, R.; Funabashi, H.; Sugiyama, S. Presented at Transducers '91, International Conference on Solid-State Sensors and Actuators Digest of Technical Papers; IEEE Press: San Francisco, 1991, pp. 811-14.
16. Finne, R. M.; Klein, D. L. J. Electrochem. Soc. 1967, 114, 965.
17. Bohg, A. J. Electrochem. Soc. 1971, 118, 401.
18. Kloeck, B.; Collins, S.; de Rooij, N.; Smith, R. L. IEEE Trans. Electron Devices 1989, 36, 663.
19. Reay, R. J.; Klaassen, E. H.; Kovacs, G.T.A. IEEE Electron Device Letters 1994, 15, 399.
20. Bloomstein, T. M.; Ehrlich, D. J. Appl. Phys. Lett. 1992, 61, 708.
21. Mehregany, M.; Gabriel, K. J.; Trimmer, W.S.N. IEEE Trans. on Electron Devices 1988, 35, 719.
22. Fan, L-S.; Tai, Y-C.; Muller, R. IEEE Trans. Electron Devices 1988, 35, 724.
23. Guckel, H.; Burns, D. W. Proc. IEEE International Electron Devices Meeting 1984, 223-25.
24. Petersen, K.; Barth, P.; Paydock, J.; Brown, J.; Mallon, J.; Bryzek, J. Technical Digest, IEEE Solid-State Sensor and Actuator Workshop 1988, 144.
25. Klassen, E. H., et al. Presented at Transducers '95, International Conference on Solid-State Sensors and Actuators; Stockholm, Sweden, 1995; pp. 556-63.
26. Frazier, A. B.; Allen, M. G. J. Microelectromech. Syst. 1993, 2, 87.
27. Ehrfeld, W.; Götze, F.; Munchmeyer, D.; Shelb, W.; Schmidt, D. Technical Digest, IEEE Solid-State Sensor and Actuator Workshop 1988, 1-4.
28. Becker, E. W.; Ehrfeld, W.; Hagmann, W.; Maner, A.; Munchmeyer, D. Microelectron. Eng. 1986, 4, 35.
29. Pister, K.S.J., et al. Sens. and Actuators 1992, A33, 249.
30. Spindt, C. A., et al. J. Vac. Sci. Technol. 1993, 11, 468.
31. Erickson, K. A.; Wilding, P. Clin. Chem. 1993, 39, 283.