Integrated devices make an optical bench on a chip

Laser Focus World

Volumn 32, Issue 2, 1996, Pages 64-68

  Wu, Ming C ^a   Lin, L Y ^a   Lee, S S ^a   King, C R ^a  

^a Engineering IV   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LITHOGRAPHY; MICROELECTRONIC PROCESSING; MICROMACHINING; OPTICAL DESIGN; OPTICAL DEVICES; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; SEMICONDUCTING SILICON; SUBSTRATES;

BATCH MODE LITHOGRAPHY; BEAM STEERING; FREE SPACE MICRO OPTICAL BENCH COMPONENTS; FRESNEL LENS; INTEGRATED MICROOPTICS; MICROOPTICAL SYSTEM; OPTICAL ALIGNMENT;

INTEGRATED OPTICS;

EID: 0030085267     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)

1. L. Y. Lin et al., IEEE Photon. Technol. Lett. 6, 1445 (1994).
2. K. S. J. Pister et al., Sensors and Actuators A 33, 149 (1992).
3. L. Y. Lin et al., Appl. Phys. Lett. 66, 2946 (1995).
4. S. S. Lee et al., IEEE Photon. Technol. Lett. 7, 1031 (1995).
5. A. Selvakumar et al., Proc. IEEE MEMS Workshop, 43 (Amsterdam, Netherlands, 1995).
6. O. Solgaard et al., IEEE Photon. Technol. Lett. 7, 41 (1995).
7. S. S. Lee, L. Y. Lin, and M. C. Wu, Electron. Lett. 31, 1481 (1995).