"soft Si": Effective stiffness of supported crystalline nanomembranes

ACS Nano

Volumn 5, Issue 7, 2011, Pages 5400-5407

  Cavallo, Francesca ^a   Grierson, David S ^a   Turner, Kevin T ^a   Lagally, Max G ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

effective compliance stiffness; elastic mismatch; layered materials; nanomembranes; scale of deformation; silicon; thinness

Indexed keywords

EFFECTIVE COMPLIANCE/STIFFNESS; ELASTIC MISMATCH; LAYERED MATERIAL; NANOMEMBRANES; SCALE OF DEFORMATION; THINNESS;

CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; DEFORMATION; ELASTIC MODULI; FINITE ELEMENT METHOD; NANOSTRUCTURES; STIFFNESS;

SUBSTRATES;

BAYSILON; DIMETICONE; NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; CRYSTALLIZATION; ELASTICITY; FINITE ELEMENT ANALYSIS; SEMICONDUCTOR;

CRYSTALLIZATION; DIMETHYLPOLYSILOXANES; ELASTICITY; FINITE ELEMENT ANALYSIS; NANOSTRUCTURES; SEMICONDUCTORS; SILICON;

EID: 79961066956     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn200461g     Document Type: Conference Paper

References (38)

1. Menard, E.; Nuzzo, R. G.; Rogers, J. A. Bendable Single-Crystal Silicon Thin-Film Transistors Formed by Printing on Plastic Substrates Appl. Phys. Lett. 2005, 86, 093507(1-3)
2. Yuan, H. C.; Ma, Z. Q.; Roberts, M. M.; Savage, D. E.; Lagally, M. G. High-Speed Strained-Single-Crystal Silicon Thin-Film Transistors on Flexible Polymers J. Appl. Phys. 2006, 100, 013708(1-3)
3. Ahn, J.-H.; Kim, H.-S.; Menard, E.; Lee, K. J.; Zhu, Z.; Kim, D.-H.; Nuzzo, R. G.; Rogers, J. A.; Amlani, I.; Kushner, V. et al. Bendable Integrated Circuits on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon Appl. Phys. Lett. 2007, 90, 213501(1-3)
4. Kim, D.-H.; Song, J.; Choi, W. M.; Kim, H.-S.; Kim, R.-H.; Liu, Z.; Huang, Y. Y.; Hwang, K. C.; Zhang, Y.-W.; Rogers, J. A. Materials and Non-coplanar Mesh Designs for Integrated Circuits with Linear Elastic Responses to Extreme Mechanical Deformations Proc. Natl. Acad. Sci. U.S.A. 2008, 105, 18675-18680
5. Yuan, H. C.; Shin, J. Y.; Qin, G. X.; Sun, L.; Bhattacharya, P.; Celler, G. K.; Lagally, M. G.; Ma, Z. Q. Flexible Photodetectors on Plastic Substrates by Use of Printing Transferred Single-Crystal Germanium Membranes Appl. Phys. Lett. 2009, 94, 013102(1-3)
6. Ko, H.; Takei, K.; Kapadia, R.; Chuang, S.; Fang, H.; Leu, P. W.; Ganapathi, K.; Plis, E.; Kim, H.; Chen, S.-Y. et al. Ultrathin Compound Semiconductor on Insulator Layers for High-Performance Nanoscale Transistors Nature 2010, 468, 286-289
7. Sun, L.; Qin, G; Seo, J.-H.; Celler, G. K.; Zhou, W.; Ma, Z. 12-GHz Thin-Film Transistors on Transferrable Silicon Nanomembranes for High-Performance Flexible Electronics Small 2010, 6, 2553-2557
8. Roberts, M. M; Klein, L. J.; Savage, D. E.; Slinker, K. A.; Friesen, M.; Celler, G. K.; Eriksson, M. A.; Lagally, M. G. Elastically Relaxed Free-Standing Strained-Si Nanomembranes Nat. Mater. 2006, 5, 388-393
9. Ko, H. C.; Shin, G.; Wang, S.; Stoykovich, M. P.; Lee, J. W.; Kim, D.-H.; Ha, J. S.; Huang, Y.; Hwang, K.-C.; Rogers, J. A. Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements Small 2010, 5, 2703-2709
10. Wang, S.; Xiao, J.; Song, J.; Ko, H. C.; Hwang, K. C.; Huang, Y.; Rogers, J. A. Mechanics of Curvilinear Electronics Soft Matter 2010, 6, 5757-5763
11. Huang, M.; Ritz, C. S.; Novakovic, B.; Yu, D.; Zhang, Y.; Savage, D. E.; Flack, F. S.; Evans, P. G.; Knezevic, I.; Liu, F.; Lagally, M. G. Mechano-electronic Superlattices in Silicon Nanoribbons ACS Nano 2009, 3, 721-727
12. Scott, S. A.; Peng, W.; Kiefer, A. M.; Jiang, H.; Knezevic, I.; Savage, D. E.; Eriksson, M. A.; Lagally, M. G. Influence of Surface Chemical Modification on Charge Transport Properties in Ultrathin Silicon Membranes ACS Nano 2009, 3, 1683-1692
13. Chen, F.; Ramayya, E. B.; Euaruksakul, C.; Himpsel, F. J.; Celler, G. K.; Ding, B.; Knezevic, I.; Lagally, M. G. Quantum Confinement, Surface Roughness, and the Conduction Band Structure of Ultrathin Silicon Membranes ACS Nano 2010, 4, 2466-2472
14. He, J.; Kunitake, T. Are Ceramic Nanofilms a Soft Matter? Soft Matter 2006, 2, 119-125
15. Cavallo, F.; Lagally, M. G. Semiconductors Turn Soft: Inorganic Nanomembranes Soft Matter 2010, 6, 439-455
16. Audoly, B.; Pomeau, Y. Elasticity and Geometry: From Hair Curls to the Non-Linear Response of Shells; Oxford University Press: New York, 2010.
17. Discher, D. E.; Janmey, P.; Wang, Y. Tissue Cells Feel and Respond to the Stiffness of Their Substrate Science 2005, 310, 1139-1143 (Pubitemid 41681732)
18. Burnett, P. J.; Rickerby, D. S. The Mechanical Properties of Wear-Resistant Coatings: I: Modelling of Hardness Behaviour Thin Solid Films 1987, 148, 41-50 (Pubitemid 17568768)
19. Bolshakov, A.; Pharr, G. M. Influence of Pile-up on the Measurements of Mechanical Properties by Load and Depth Sensing Indentation Techniques J. Mater. Res. 1998, 13, 1049-1058 (Pubitemid 128565431)
20. Yoffe, E. H. The Elastic Compliance of a Film on a Substrate Phil. Mag. Lett. 1998, 77, 69-78
21. Saha, R.; Nix, D. Effects of the Substrate on the Determination of Thin Film Mechanical Properties by Nanoindentation Acta Mater. 2002, 50, 23-28
22. Zheng, Z. W.; Sridhar, I. Spherical Indentation of an Elastic Thin Film on an Elastic-Ideally Plastic Substrate Mater. Sci. Eng., A 2006, 423, 64-69
23. McGuiggan, P. M.; Wallace, J. S.; Smith, D. T.; Sridhar, I.; Zheng, Z. W.; Johnson, K. L. Contact Mechanics of Layered Elastic Materials: Experiment and Theory J. Phys. D: Appl. Phys. 2007, 40, 5984-5994 (Pubitemid 47469837)
24. Buršikova, V.; Sládek, P.; St'ahel, P.; Buršik, J. Mechanical Properties of Thin Silicon Films Deposited on Glass and Plastic Substrates Studied by Depth Sensing Indentation Technique J. Non-Cryst. Solids 2006, 352, 1242-1245 (Pubitemid 43816534)
25. Nguyen, T. D.; Yeager, J. D.; Bahr, D. F.; Adams, D. P.; Moody, N. R. Nanoindentation of Compliant Substrate Systems: Effects of Geometry and Compliance J. Eng. Mater. Technol. 2010, 132, 021001(1-7)
26. Wang, T. H.; Fang, T.-H.; Kang, S.-H.; Lin, Y.-C. Nanoindentation Characteristics of Clamped Cu Membranes Nanotechnology 2007, 135701(1-6)
27. Lee, C.; Wei, X.; Kysar, J. W.; Hone, J. W. Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene Science 2008, 321, 385-388 (Pubitemid 352029970)
28. Page, T. F.; Hainsworth, S. V. Using Nanoindentation Techniques for the Characterization of Coated Systems: A Critique Surf. Coat. Technol. 1993, 61, 201-208
29. Ramsey, P. M.; Chandler, H. W.; Page, T. F. Modelling the Contact Response of Coated Systems Surf. Coat. Technol. 1991, 49, 504-509
30. McGurk, M. R.; Chandler, H. W.; Twigg, P. C.; Page, T. F. Modelling the Hardness Response of Coated Systems: The Plate Bending Approach Surf. Coat. Technol. 1994, 68-69, 576-581
31. Gerberich, W. W.; Strojny, A.; Yoder, K.; Cheng, L. Hard Protective Overlayers on Viscoelastic-Plastic Substrates J. Mater. Res. 1999, 14, 2210-2218
32. Yoo, Y.; Lee, W.; Shin, H. Spherical Nano-indentation of a Hard Thin-Film/Soft Substrate Layered System: I. Critical Indentation Depth Modelling Simul. Mater. Sci. Eng. 2004, 12, 59-67
33. Yoo, Y.; Lee, W.; Shin, H. Spherical Nano-indentation of a Hard Thin-Film/Soft Substrate Layered System: II. Evolution of Stress and Strain Fields Modelling Simul. Mater. Sci. Eng. 2004, 12, 69-78
34. Johnson, L. K. Contact Mechanics; Cambridge University Press: New York, 1985.
35. Carpick, R. W.; Ogletree, D. F.; Salmeron, M. Lateral Stiffness: A New Nanomechanical Measurement for the Determination of Shear Strengths with Friction Force Microscopy Appl. Phys. Lett. 1997, 70, 1548-1550 (Pubitemid 127637116)
36. Janmey, P. A.; McCulloch, C. A. Cell Mechanics: Integrating Cell Response to Mechanical Stimuli Annu. Rev. Biomed. Eng. 2007, 9, 1-34 (Pubitemid 350252899)
37. Duffy, D. C.; McDonald, J. C.; Schueller, O. J. A.; Whitesides, G. M. Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) Anal. Chem. 1998, 70, 4974-4984
38. Villarrubia, J. S. Algorithms for Scanned Probe Microscope, Image Simulation, Surface Reconstruction, and Tip Estimation J. Res. Natl. Inst. Stand. Technol. 1997, 102, 435-454