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Volumn 77, Issue 2, 1998, Pages 69-78
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The elastic compliance of a surface film on a substrate
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Author keywords
[No Author keywords available]
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Indexed keywords
ELASTIC MODULI;
ESTIMATION;
HARDNESS;
MECHANICAL TESTING;
STRESSES;
SUBSTRATES;
THICKNESS MEASUREMENT;
THIN FILMS;
FILM THICKNESS;
NANOINDENTATION;
ELASTICITY;
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EID: 0031995342
PISSN: 09500839
EISSN: 13623036
Source Type: Journal
DOI: 10.1080/095008398178624 Document Type: Article |
Times cited : (21)
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References (11)
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