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Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1242-1245
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Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique
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Author keywords
Amorphous semiconductors; Creep; Hardness; Intendation; Mechanical properties; Microintendation; Silicon
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Indexed keywords
CREEP;
DEPOSITION;
GLASS;
MECHANICAL PROPERTIES;
POLYETHYLENE TEREPHTHALATES;
SUBSTRATES;
VISCOELASTICITY;
AMORPHOUS SEMICONDUCTORS;
INTENDATION;
MICROINTENDATION;
THIN FILMS;
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EID: 33744539247
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.12.049 Document Type: Article |
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Times cited : (6)
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References (8)
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