Nanoindentation of compliant substrate systems: effects of geometry and compliance

Journal of Engineering Materials and Technology

Volumn 132, Issue 2, 2010, Pages 0210011-0210017

  Nguyen, Thao D ^a   Yeager, J D ^b   Bahr, D F ^b   Adams, D P ^c   Moody, N R ^d  

^a Johns Hopkins University   (United States)

^b Washington State University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING TESTS; FINITE ELEMENT METHOD; NANOINDENTATION; THIN FILMS;

COMPLIANT SUBSTRATES; FILM MODULUS; FILM-THICKNESS; INTERFACIAL PROPERTY; MECHANICAL; NANO INDENTATION; PLATE BENDING; SUBSTRATE SYSTEM; SYSTEM EFFECTS; THIN FILM SYSTEMS;

FILM THICKNESS;

EID: 85146334987     PISSN: 00944289     EISSN: 15288889     Source Type: Journal    
DOI: 10.1115/1.4000230     Document Type: Article

References (16)

1. Cadogan, D. P., and Shook, L. S., 2005, "Manufacturing and Performance Assessments of Several Applications of Electrotextiles and Large-Area Flexible Circuits", Materials Research Society Symposium Proceedings, Vol. 736, pp. D1.5.1-D1.5.12.
2. Khang, D., Jiang, H., Huang, Y., and Rogers, J. A., 2006, "A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates", Science, 311, pp. 208-212.
3. Kennedy, M. S., Moody, N. R., and Bahr, D. F., 2005, "Investigation of Indentation Methods for Properties Determination in Hard Film-Soft Substrate Systems", Materials Research Society Symposium Proceedings, Vol. 841, pp. R12.7.1-R12.7.6.
4. Li, X., and Bhushan, B., 2002, "A Review of Nanoindentation Continuous Stiffness Measurement Technique and Its Application", Mater. Charact, 48, pp. 11-36.
5. Page, T. F., and Hainsworth, S. V., 1993, "Using Nanoindentation Techniques for the Characterization of Coated Systems: A Critque", Surf. Coat. Technol., 61, pp. 201-208.
6. Ramsey, P. M., Chandler, H. W., and Page, T. F., 1991, "Modelling the Contact Response of Coated Systems", Surf. Coat. Technol., 49, pp. 504-509.
7. McGurk, M. R., Chandler, H. W., Twigg, P. C., and Page, T. F., 1994, "Modelling the Hardness Response of Coated Systems: The Plate Bending Approach", Surf. Coat. Technol., 68-69, pp. 576-581.
8. Gerberich, W. W., Strojny, A., Yoder, K., and Cheng, L., 1999, "Hard Protective Overlayers on Viscoelastic-Plastic Substrates", J. Mater. Res., 14, pp. 2210-2218.
9. Bahr, D. F., Woodcock, C. L., Pang, M., Weaver, K. D., and Moody, N. R., 2003, "Indentation Induced Film Fracture in Hard Film-Soft Substrate Systems", Int. J. Fract, 119, pp. 339-349.
10. Yoo, Y., Lee, W., and Shin, H., 2004, "Spherical Nano-Indentation of a Hard Thin Film/Soft Substrate Layered System: I. Critical Indentation Depth", Mod-ell. Simul. Mater. Sci. Eng., 12, pp. 59-67.
11. Yoo, Y., Lee, W., and Shin, H., 2004, "Spherical Nano-Indentation of a Hard Thin Film/Soft Substrate Layered System: II. Evolution of Stress and Strain Fields", Modell. Simul. Mater. Sci. Eng., 12, pp. 69-78.
12. Ni, W., and Cheng, Y., 2005, "Modeling Conical Indentation in Homogeneous Materials and in Hard Films on Soft Substrates", J. Mater. Sci., 20, pp. 521-528.
13. Vanimisetti, S. K., and Narasimhan, R., 2006, "A Numerical Analysis of Spherical Indentation Response of Thin Hard Films on Soft Substrates", Int. J. Solids Struct., 43, pp. 6180-6193.
14. Timoshenko, S., and Woinowsky-Krieger, S., 1959, Theory of Plates and Shells, 2nd ed., McGraw-Hill, New York.
15. Mesarovic, S. Dj., and Fleck, N. A., 1999, "Spherical Indentation of Elastic-Plastic Solids", Proc. R. Soc. London, Ser. A, 455, pp. 2707-2728.
16. Holzapfel, G. A., 2000, Nonlinear Solid Mechanics: A Continuum Approach for Engineers, Wiley, Chichester, UK.