SCOPUS 정보 검색 플랫폼

Volumn 44, Issue 28, 2011, Pages

Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy

(4) Lee, Young Kwang a Moon, Se Youn b Oh, Se Jin a Chung, Chin Wook a

a Hanyang University (South Korea)

b LG Electronics Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMAS; COLLISIONAL RADIATIVE MODEL; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON EXCITATIONS; ESCAPE FACTORS; HIGH PRESSURE; INDUCTIVELY-COUPLED; LINE INTENSITIES; LINE RATIO METHOD; METASTABLE LEVELS; PLASMA PARAMETER; PRESSURE DEPENDENCE; PRESSURE RANGES; RADIATION TRAPPING; SPECTRAL LINE;

COLLISIONAL PLASMAS; DISTRIBUTION FUNCTIONS; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY ANALYZERS; EMISSION SPECTROSCOPY; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; PRESSURE EFFECTS;

PLASMA DIAGNOSTICS;

EID: 79960266273 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/44/28/285203 Document Type: Article

Times cited : (17)

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