Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

Journal of Physics D: Applied Physics

Volumn 43, Issue 50, 2010, Pages

  Navratil Z ^a   Dvorak P ^a   Brzobohaty O ^b   Trunec, D ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

^b INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE INTENSITY; ABSOLUTE VALUES; BULK PLASMA; CAPACITIVELY COUPLED DISCHARGES; CAPACITIVELY COUPLED RF DISCHARGE; COLLISIONAL RADIATIVE MODEL; ELECTRON DENSITIES; ICCD CAMERAS; LANGMUIR PROBE MEASUREMENTS; MAXIMUM VALUES; MEASURING TECHNIQUE; PLASMA PARAMETER; POWER DEPENDENCE; RADIO FREQUENCIES; RF-POWER; S STATE;

CARRIER CONCENTRATION; COLLISIONAL PLASMAS; DENSITY FUNCTIONAL THEORY; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; EMISSION SPECTROSCOPY; LANGMUIR PROBES; LIGHT EMISSION; NEON; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; PROBES;

ELECTRON TEMPERATURE;

EID: 78650091369     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/50/505203     Document Type: Article

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