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Volumn 41, Issue 15, 2008, Pages
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Determination of the electron temperature in a planar inductive argon plasma with emission spectroscopy and electrostatic probe
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
ATOMIC SPECTROSCOPY;
AUGER ELECTRON SPECTROSCOPY;
ELECTRIC EXCITATION;
ELECTRON TEMPERATURE;
ELECTRONS;
EMISSION SPECTROSCOPY;
INERT GASES;
LANGMUIR PROBES;
LEAKAGE (FLUID);
MAGNETRONS;
MOLECULAR SPECTROSCOPY;
OPTICAL EMISSION SPECTROSCOPY;
PHOTORESISTS;
PLASMAS;
PROBABILITY DISTRIBUTIONS;
RISK ASSESSMENT;
SPECTRUM ANALYSIS;
ARGON PLASMAS;
CORRECTION FACTORS;
DEGREE OF EXCITATION;
ELECTRON DENSITIES;
ELECTRON ENERGY PROBABILITY FUNCTION;
ELECTRON EXCITATIONS;
ELECTROSTATIC PROBES;
GAS PRESSURES;
LANGMUIR;
LIGHT INTENSITIES;
LOWER PRESSURES;
MAXWELLIAN DISTRIBUTIONS;
OPTICAL EMISSION SPECTROSCOPY (OES);
OPTICAL-;
PROBE MEASUREMENTS;
SPECTRAL LINES;
INTEGRATED OPTOELECTRONICS;
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EID: 49749125231
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/41/15/155203 Document Type: Article |
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Times cited : (17)
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References (17)
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