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Applied Physics Letters

Volumn 98, Issue 21, 2011, Pages

In situ investigation of hydrogen interacting with Si(100)

(4) Brückner, Sebastian a Döscher, Henning a Kleinschmidt, Peter a Hannappel, Thomas a

a HAHN MEITNER INSTITUT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE PROCESS; DESORPTION CHARACTERISTICS; HYDROGEN ADSORPTION; IN-SITU; MONOHYDRIDES; PROCESS GAS; PROTECTIVE OXIDES; RECONSTRUCTED SURFACES; REFLECTANCE ANISOTROPY SPECTROSCOPY; SI(1 0 0); SI-H BONDS; SILICON SURFACES; THERMAL-ANNEALING;

DANGLING BONDS; DESORPTION; HYDROGEN; HYDROGEN BONDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; VAPOR PHASE EPITAXY; VAPORS;

GAS ADSORPTION;

EID: 79959445403 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3593195 Document Type: Article

Times cited : (29)

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