SCOPUS 정보 검색 플랫폼

Volumn 98, Issue 23, 2011, Pages

Compositional dependence of trap density and origin in thin silicon oxynitride film investigated using spin dependent Poole-Frenkel current

(3) Yonamoto, Yoshiki a Inaba, Yutaka b Akamatsu, Naotoshi a

a HITACHI LTD (Japan)

b RENESAS TECHNOLOGY CORP (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITIONAL DEPENDENCE; FILM STRAIN; OXYGEN ATOM; OXYGEN CONCENTRATIONS; POOLE-FRENKEL; SILICON OXYNITRIDE FILMS; SILICON OXYNITRIDES; TRAP DENSITY;

CHEMICAL VAPOR DEPOSITION; OXYGEN; SILICON NITRIDE;

SILICON OXIDES;

EID: 79959365037 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3598393 Document Type: Article

Times cited : (3)

References (18)

1
- 0008853906
- 0021-8979, 10.1063/1.363142
- S. Hasegawa, M. Ikeda, T. Inokuma, and Y. Kurata, J. Appl. Phys. 0021-8979 80, 2896 (1996). 10.1063/1.363142
- (1996) J. Appl. Phys. , vol.80 , pp. 2896
- Hasegawa, S.¹ Ikeda, M.² Inokuma, T.³ Kurata, Y.⁴

2
- 0029277386
- 0021-4922, 10.1143/JJAP.34.L371
- H. Matsuura, M. Yoshimoto, and H. Matsunami, Jpn. J. Appl. Phys., Part 2 0021-4922 34, L371 (1995). 10.1143/JJAP.34.L371
- (1995) Jpn. J. Appl. Phys., Part 2 , vol.34 , pp. 371
- Matsuura, H.¹ Yoshimoto, M.² Matsunami, H.³

3
- 36449005463
- 0021-8979, 10.1063/1.355315
- W. L. Warren, J. Kanicki, J. Robertson, E. H. Poindexter, and P. J. McWhorter, J. Appl. Phys. 0021-8979 74, 4034 (1993). 10.1063/1.355315
- (1993) J. Appl. Phys. , vol.74 , pp. 4034
- Warren, W.L.¹ Kanicki, J.² Robertson, J.³ Poindexter, E.H.⁴ McWhorter, P.J.⁵

4
- 36549097256
- 0003-6951, 10.1063/1.101558
- D. Jousse, J. Kanicki, and J. H. Stashis, Appl. Phys. Lett. 0003-6951 54, 1043 (1989). 10.1063/1.101558
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1043
- Jousse, D.¹ Kanicki, J.² Stashis, J.H.³

5
- 0000542619
- 0021-8979, 10.1063/1.349433
- W. L. Warren, P. M. Lenahan, and J. Kanicki, J. Appl. Phys. 0021-8979 70, 2220 (1991). 10.1063/1.349433
- (1991) J. Appl. Phys. , vol.70 , pp. 2220
- Warren, W.L.¹ Lenahan, P.M.² Kanicki, J.³

6
- 0042700011
- 0038-1101, 10.1016/S0038-1101(03)00175-8
- M. Abu El-Oyoun, T. Inokuma, Y. Kurata, and S. Hasegawa, Solid-State Electron. 0038-1101 47, 1669 (2003). 10.1016/S0038-1101(03)00175-8
- (2003) Solid-State Electron. , vol.47 , pp. 1669
- Abu El-Oyoun, M.¹ Inokuma, T.² Kurata, Y.³ Hasegawa, S.⁴

7
- 0037460308
- 0040-6090, 10.1016/S0040-6090(02)00917-3
- M. Futatsudera, T. Kimura, A. Matsumoto, T. Inokuma, Y. Kurata, and S. Hasegawa, Thin Solid Films 0040-6090 424, 148 (2003). 10.1016/S0040-6090(02) 00917-3
- (2003) Thin Solid Films , vol.424 , pp. 148
- Futatsudera, M.¹ Kimura, T.² Matsumoto, A.³ Inokuma, T.⁴ Kurata, Y.⁵ Hasegawa, S.⁶

8
- 33744511133
- y thin films and correlation with structural defects
- DOI 10.1016/j.apsusc.2005.12.129, PII S0169433205017915
- F. Rebib, E. Tomasella, S. Aida, M. Dubois, J. Cellier, and M. Jacquet, Appl. Surf. Sci. 0169-4332 252, 5607 (2006). 10.1016/j.apsusc.2005.12.129 (Pubitemid 43817266)
- (2006) Applied Surface Science , vol.252 , Issue.15 , pp. 5607-5610
- Rebib, F.¹ Tomasella, E.² Aida, S.³ Dubois, M.⁴ Cellier, J.⁵ Jacquet, M.⁶

9
- 0038341930
- 0021-8979, 10.1063/1.1566476
- A. del Prado, E. San Andŕs, I. Mártil, G. González-Diaz, D. Bravo, F. J. López, W. Bohne, J. Röhrich, B. Selle, and F. L. Martinez, J. Appl. Phys. 0021-8979 93, 8930 (2003). 10.1063/1.1566476
- (2003) J. Appl. Phys. , vol.93 , pp. 8930
- Del Prado, A.¹ San Andŕs, E.² Mártil, I.³ González-Diaz, G.⁴ Bravo, D.⁵ López, F.J.⁶ Bohne, W.⁷ Röhrich, J.⁸ Selle, B.⁹ Martinez, F.L.¹⁰

10
- 0012493199
- 0003-6951, 10.1063/1.114892
- S. Garcia, D. Bravo, F. Fernandez, I. Martil, and F. J. López, Appl. Phys. Lett. 0003-6951 67, 3263 (1995). 10.1063/1.114892
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3263
- Garcia, S.¹ Bravo, D.² Fernandez, F.³ Martil, I.⁴ López, F.J.⁵

11
- 0001352998
- Structure of defects in silicon oxynitride films
- DOI 10.1063/1.1343895
- S. Hasegawa, S. Sakamori, M. Futatsudera, T. Inokuma, and Y. Kurata, J. Appl. Phys. 0021-8979 89, 2598 (2001). 10.1063/1.1343895 (Pubitemid 33662156)
- (2001) Journal of Applied Physics , vol.89 , Issue.5 , pp. 2598-2605
- Hasegawa, S.¹ Sakamori, S.² Futatsudera, M.³ Inokuma, T.⁴ Kurata, Y.⁵

12
- 0028464205
- 0927-796X, 10.1016/0927-796X(94)90006-X
- F. H. P. M. Habraken and A. E. T. Kuiper, Mater. Sci. Eng. R. 0927-796X 12, 123 (1994). 10.1016/0927-796X(94)90006-X
- (1994) Mater. Sci. Eng. R. , vol.12 , pp. 123
- Habraken, F.H.P.M.¹ Kuiper, A.E.T.²

13
- 36449004420
- Electrically detected magnetic resonance study of stress-induced leakage current in thin SiO2
- DOI 10.1063/1.115900, PII S0003695196029129
- J. H. Stathis, Appl. Phys. Lett. 0003-6951 68, 1669 (1996). 10.1063/1.115900 (Pubitemid 126688349)
- (1996) Applied Physics Letters , vol.68 , Issue.12 , pp. 1669-1671
- Stathis, J.H.¹

14
- 70249136483
- 0003-6951, 10.1063/1.3226633
- J. T. Ryan, P. M. Lenahan, A. T. Krishnan, and S. Krishnan, Appl. Phys. Lett. 0003-6951 95, 103503 (2009). 10.1063/1.3226633
- (2009) Appl. Phys. Lett. , vol.95 , pp. 103503
- Ryan, J.T.¹ Lenahan, P.M.² Krishnan, A.T.³ Krishnan, S.⁴

15
- 0346539170
- 0556-2805, 10.1103/PhysRevB.6.436
- D. J. Lepine, Phys. Rev. B 0556-2805 6, 436 (1972). 10.1103/PhysRevB.6. 436
- (1972) Phys. Rev. B , vol.6 , pp. 436
- Lepine, D.J.¹

16
- 0842290112
- 0003-6951, 10.1063/1.1639132
- S. Habermehl and R. T. Apodaca, Appl. Phys. Lett. 0003-6951 84, 215 (2004). 10.1063/1.1639132
- (2004) Appl. Phys. Lett. , vol.84 , pp. 215
- Habermehl, S.¹ Apodaca, R.T.²

17
- 84861435358
- x layers for high-quality silicon surface passivation
- DOI 10.1063/1.1495529
- H. Mäckel and R. Lüdemann, J. Appl. Phys. 0021-8979 92, 2602 (2002). 10.1063/1.1495529 (Pubitemid 35037864)
- (2002) Journal of Applied Physics , vol.92 , Issue.5 , pp. 2602
- Mackel, H.¹ Ludemann, R.²

18
- 33748465169
- Density functional theory study of deep traps in silicon nitride memories
- DOI 10.1063/1.2260829
- M. Petersen and Y. Roizin, Appl. Phys. Lett. 0003-6951 89, 053511 (2006). 10.1063/1.2260829 (Pubitemid 44350301)
- (2006) Applied Physics Letters , vol.89 , Issue.5 , pp. 053511
- Petersen, M.¹ Roizin, Y.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.