Microwave characterization of PZT/ZrO2 thin films

European Microwave Week 2010, EuMW2010: Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010

Volumn , Issue , 2010, Pages 1579-1582

  Min, Deokki ^a   Hoivik, Nils ^a   Jensen, Geir Uri ^b   Hanke, Ulrik ^a  

^a UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

^b SINTEF ICT   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SHUNT SWITCH; CONFORMAL MAPPING METHOD; CORRECTED LOSS; HIGH DIELECTRIC CONSTANTS; MICROWAVE CHARACTERIZATION; PZT FILM; RELATIVE DIELECTRIC CONSTANT; RF-MEMS; TWO LAYERS;

CONFORMAL MAPPING; PERMITTIVITY; THIN FILMS; ZIRCONIUM ALLOYS;

MICROWAVES;

EID: 78650060139     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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