Improved characterization and modeling of PZT thin film capacitors

2007 Asia-Pacific Conference on Applied Electromagnetics Proceedings, APACE2007

Volumn , Issue , 2007, Pages

  Lazim, Nor Fazlina Mohd ^a   Awang, Zaiki ^a   Majid, Zulkifli Abd ^a   Yusof, Ashaari ^b   Dollah, Asban ^b  

^a UNIVERSITI TEKNOLOGI MARA   (Malaysia)

^b Telekom Research and Development Sdn Bhd   (Malaysia)

Author keywords

MMIC capacitors; Thin dielectric films

Indexed keywords

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; DIELECTRIC MATERIALS; ELECTRIC EQUIPMENT; ELECTROMAGNETISM; ELECTRONICS INDUSTRY; ENERGY STORAGE; INTEGRATED CIRCUITS; MAGNETISM; MICROWAVE CIRCUITS; MICROWAVE INTEGRATED CIRCUITS; NITRIDES; NONMETALS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SILICON; SILICON NITRIDE; THICK FILMS; THIN FILM CIRCUITS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

AND MODELING; ASIA-PACIFIC; CIRCUIT SIZE; ELECTRO-MAGNETICS; LEAD ZIRCONATE TITANATE THIN FILMS; MMIC CAPACITORS; MONOLITHIC MICROWAVE INTEGRATED CIRCUIT (MMIC); PZT THIN FILMS; THIN DIELECTRIC FILMS; THIN-FILM CAPACITORS; TITANATE FILMS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 52949101772     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APACE.2007.4603970     Document Type: Conference Paper

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