Leakage current evolution versus dielectric thickness in lead zirconate titanate thin film capacitors

Journal of Applied Physics

Volumn 105, Issue 6, 2009, Pages

  Chentir, Mohamed Tahar ^a,b   Bouyssou, Emilien ^b   Ventura, Laurent ^a   Anceau, Christine ^b  

^a UNIVERSITÉ DE TOURS   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTION MODES; CURRENT MECHANISMS; CURRENT SWITCHES; DEAD LAYERS; DEFECT CONCENTRATIONS; DIELECTRIC THICKNESS; LEAD ZIRCONATE TITANATE THIN FILMS; LEAD ZIRCONATE TITANATES; POOLE-FRENKEL CONDUCTION MECHANISMS; PZT; SCHOTTKY;

CAPACITANCE; CAPACITORS; LEAKAGE CURRENTS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SWITCHES; THIN FILM CIRCUITS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 63749091584     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3055416     Document Type: Article

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