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Volumn 6, Issue 1, 2011, Pages 307-317

A study on the influence of the primary electron beam on nanodimensional layers analysis

Author keywords

EDS microanalysis; Monte Carlo simulation; Nanolayers; SEM

Indexed keywords


EID: 79958076559     PISSN: None     EISSN: 18423582     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (35)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.