Monte Carlo simulation of electron depth distribution and backscattering for carbon films deposited on aluminium as a function of incidence angle and primary energy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 337-340

  Dapor, Maurizio ^a  

^a ITC IRST   (Italy)

Author keywords

Electron beam interactions with solids; Impact phenomena; Monte Carlo simulation; Surface film

Indexed keywords

CARBON FILMS; ELECTRON-BEAM INTERACTIONS WITH SOLIDS; IMPACT PHENOMENA; SURFACE FILM;

ALUMINUM; AUGER ELECTRON SPECTROSCOPY; BACKSCATTERING; COMPUTER SIMULATION; MONTE CARLO METHODS; POLYESTERS; POLYMERS; SUBSTRATES;

ELECTRON BEAMS;

EID: 11344292034     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.10.067     Document Type: Conference Paper

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