Metallic thin film depth measurements by X-ray microanalysis

Applied Surface Science

Volumn 252, Issue 11, 2006, Pages 3972-3976

  Ng, F L ^a   Wei, J ^a   Lai, F K ^a   Goh, K L ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Monte Carlo modeling; Penetration depth; Thin films

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; MULTILAYERS; THIN FILMS; X RAY ANALYSIS;

ATOMIC NUMBER; ELECTRON BEAM ENERGY; METALLIC THIN FILM; PENETRATION DEPTH;

BATHYMETRY;

EID: 33645217814     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.09.038     Document Type: Conference Paper

References (13)

1. Tulip Johan, and Jerry Brewer Are you in control of your electroless nickel/immersion gold process? Proceedings of IPC Works 2000, Paper No. S03-3 Miami, FL, September 9-14 2000
2. Sequin Mei, Matt Kaufmann, Ali Eslambolchi, and Pat Johnson Brittle interfacial fracture of PBGA packages on electroless Ni/immersion Au Proceedings of the 48th Electronic Component and Technology Conference May 1998 952 961
3. Anastasia L. Elias, Kenneth D. Harris, and Michael J. Brett Fabrication of helically perforated gold, nickel, and polystyrene thin films J. Microelectromech. Syst. 13 2004 808 813
4. K. Rajanna, S. Mohan, M.M. Nayak, N. Gunasekaran, and A.E. Muthunayagam Pressure transducer with Au-Ni thin film strain gauges IEEE Trans. Electron Devices 40 1993 521 524
5. J.I. Goldstein, D.E. Newbury, D.C. Joy, C. Lyman, P. Echlin, E. Lifshin, L. Sawyer, and J. Michael Scanning Electron Microscopy and X-ray Microanalysis 3rd ed. 2002 Kluwer-Plenum New York
6. John-Louis Pouchou X-ray microanalysis of thin surface films and coatings Mikrochim. Acta 138 2002 133 152
7. Edward D. Boyes Analytical potential of EDS at low voltage Mikrochim. Acta 138 2002 225 234
8. Mullerova Imaging of specimens at optimized low and very low energies in scanning electron microscopy Scanning Microscopy 13 1999 7 22
9. Hiroyoshi Soezima Solid surface observation at very low accelerating voltage (200 V-1 kV) by scanning electron microscope Surf. Sci. 85 1979 610 619
10. Dale E. Newbury Barriers to quantitative electron probe X-ray microanalysis for low voltage scanning electron microscopy J. Res. NIST 107 2002 605 619
11. David C. Joy, and Carolyn S. Joy Low voltage scanning electron microscopy Micron 27 1996 247 263
12. H. Bethe Handbook of Physics 1933 Springer Berlin Heidelberg, New York
13. K. Kanaya, and S. Okayama Penetration and energy-loss theory of electrons in solid targets J. Phys. D: Appl. Phys. 5 1972 43 58