Barriers to quantitative electron probe x-ray microanalysis for low voltage scanning electron microscopy

Journal of Research of the National Institute of Standards and Technology

Volumn 107, Issue 6, 2002, Pages 605-619

  Newbury, Dale E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electron probe x ray microanalyzer; Energy dispersive spectrometry; Low voltage microanalysis; Scanning electron microscope; Wavelength dispersive spectrometry; X ray spectrometry

Indexed keywords

ELECTRONS; FLUORESCENCE; PHOTONS; PROBES; SCANNING ELECTRON MICROSCOPY; X RAY OPTICS; X RAYS;

X-RAY MICROANALYSIS;

MICROANALYSIS;

EID: 0036874065     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.107.049     Document Type: Conference Paper

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