Fabrication of novel structures on silicon with femtosecond laser pulses

Journal of Laser Micro Nanoengineering

Volumn 5, Issue 3, 2010, Pages 229-232

  Shen, W C ^a   Cheng, C W ^a   Yang, M C ^a   Kozawa, Y ^b   Sato, S ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Azimuthal polarization; Femtosecond laser; Nanostructure; Radial polarization

Indexed keywords

AZIMUTHAL POLARIZATION; FEMTOSECOND LASER; FEMTOSECOND LASER PULSE; FS PULSE; LASER FLUENCES; LASER POLARIZATION; MICRO/NANOSTRUCTURES; NOVEL STRUCTURES; RADIAL POLARIZATION; REPETITION RATE; SILICON SURFACES;

NANOSTRUCTURES; POLARIZATION; PULSE REPETITION RATE; ULTRAFAST LASERS;

ULTRASHORT PULSES;

EID: 79956117479     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2010.03.0009     Document Type: Article

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