Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

Applied Surface Science

Volumn 253, Issue 11, 2007, Pages 4970-4977

  Crawford, T H R ^a   Haugen, H K ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Femtosecond pulsed laser; Silicon; Sub wavelength period; Surface morphology

Indexed keywords

ELECTRON IRRADIATION; ENERGY GAP; LIGHT POLARIZATION; SEMICONDUCTING SILICON; SURFACE STRUCTURE;

FEMTOSECOND PULSED LASERS; LASER INDUCED PERIODIC SURFACE STRUCTURES (LIPSS); PROTRUSIONS; SUB WAVELENGTH PERIOD;

LASER PULSES;

EID: 33847254461     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.11.004     Document Type: Article

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